Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization
Terentev, T N, Zheltukhin, V S, Shemakhin, A Yu, Nekrasov, I K, Samsonova, E S, Shemakhin, E Yu, Tsokalo, I E, Tyurin, V A
Published in Journal of physics. Conference series (01.05.2022)
Published in Journal of physics. Conference series (01.05.2022)
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Journal Article
Spectral studies of inductively coupled plasma characteristics of low pressure discharges for two configurations of vacuum chambers
Shemakhin, Yu A, Samsonova, E S, Voznesenskiy, E F, Zhelonkin, Y O, Yu Shemakhin, E, Fadeev, S A, Terentev, T N, Maksimov, R A, Tyurin, V A
Published in Journal of physics. Conference series (01.05.2022)
Published in Journal of physics. Conference series (01.05.2022)
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Journal Article
Study of RF plasma flow at low pressure: electron temperature influence
Shemakhin, A Yu, Zheltukhin, V S, Shemakhin, E Yu, Pryalukin, I S
Published in Journal of physics. Conference series (01.07.2020)
Published in Journal of physics. Conference series (01.07.2020)
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Journal Article
Mathematical Simulation of a High-Frequency Low-Pressure Discharge with Gas Injection in Non-Local Approximation: Electro- and Plasmadynamics
Shemakhin, A. Yu, Zheltukhin, V. S., Shemakhin, E. Yu
Published in Journal of engineering physics and thermophysics (01.09.2021)
Published in Journal of engineering physics and thermophysics (01.09.2021)
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Journal Article