Dry etching of epitaxial InGaAs/InAlAs/InAlGaAs structures for fabrication of photonic integrated circuits
Nazib, Sami A., Hutchins-Delgado, Troy A., Sharma, Aadit, Lee, Hosuk, Jamil, Erum, Withers, Nathan J., Rotter, Thomas J., Addamane, Sadhvikas J., Nogan, John, James, Anthony R., Ross, Willard, Pete, Douglas V., Smolyakov, Gennady A., Balakrishnan, Ganesh, Osiński, Marek
Published in Optical materials express (01.02.2024)
Published in Optical materials express (01.02.2024)
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Journal Article
Silicon Quantum Photonic Integrated Circuits Comprising Superconducting Nanostripe Single-Photon Detectors
Nazib, Sami A., Hutchins-Delgado, Troy A., Lee, Hosuk, Reymatias, Mark V., Tchapda, Loic H. Djamen, Chen, Genyu, Sommer, Erika M., Peirce, Petra M., Utzinger, Benjamin C., Sharma, Aadit, Withers, Nathan J., Nogan, John, Lu, Tzu-Ming, Komissarov, Ivan, Sobolewski, Roman, Mafi, Arash, Osinski, Marek
Published in 2021 IEEE Research and Applications of Photonics in Defense Conference (RAPID) (01.08.2021)
Published in 2021 IEEE Research and Applications of Photonics in Defense Conference (RAPID) (01.08.2021)
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Conference Proceeding