Effect of Aluminum on the Structure and Electrical Properties of Amorphous Diamond-Like Silicon-Carbon Films
Popov, A. I., Barinov, A. D., Yemets, V. M., Zezin, D. A., Chukanova, T. S., Afanas’ev, V. P., Semenov-Shefov, M. A., Terekhov, V. A., Domashevskaya, E. P., Presnyakov, M. Yu, Shapetina, M. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
Get full text
Journal Article
Effect of Precursor on the Dielectric Properties of Diamond-Like Silicon–Carbon Films
Barinov, A. D., Gurinovich, T. D., Popov, A. I., Chukanova, T. S., Shapetina, M. A., Shupegin, M. L.
Published in Inorganic materials (01.08.2020)
Published in Inorganic materials (01.08.2020)
Get full text
Journal Article