Electromigration-resistance enhancement with CoWP or CuMn for advanced Cu interconnects
Christiansen, C, Baozhen Li, Angyal, M, Kane, T, McGahay, V, Yun Yu Wang, Shaoning Yao
Published in 2011 International Reliability Physics Symposium (01.04.2011)
Published in 2011 International Reliability Physics Symposium (01.04.2011)
Get full text
Conference Proceeding
Geometry, kinetics, and short length effects of electromigration in Mn doped Cu interconnects at the 32nm technology node
Christiansen, C., Baozhen Li, Angyal, M., Kane, T., McGahay, V., Yun Yu Wang, Shaoning Yao
Published in 2012 IEEE International Reliability Physics Symposium (IRPS) (01.04.2012)
Published in 2012 IEEE International Reliability Physics Symposium (IRPS) (01.04.2012)
Get full text
Conference Proceeding
A study of BEOL resistance mismatch in double patterning process
Shaoning Yao, Clevenger, Larry, Zamdmer, Noah
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
Get full text
Conference Proceeding
Vibrational Energy Dependence of the Triplet Lifetime in Isolated, Photoexcited C 60
Echt, Olof, Yao, Shaoning, Deng, Rongping, Hansen, Klavs
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (26.08.2004)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (26.08.2004)
Get full text
Journal Article
Arc-resistant crackstop
Polomoff, Nicholas A, McGahay, Vincent J, Yao, Shaoning, Arora, Anupam
Year of Publication 08.10.2019
Get full text
Year of Publication 08.10.2019
Patent
ARC-RESISTANT CRACKSTOP
ARORA, Anupam, MCGAHAY, Vincent J, POLOMOFF, Nicholas A, YAO, Shaoning
Year of Publication 07.03.2019
Get full text
Year of Publication 07.03.2019
Patent
SEMICONDUCTOR LAYOUT GENERATION
Facchini Marco, Yao Shaoning, Azuma Atsushi, Culp James A, Cui Yuping
Year of Publication 07.12.2017
Get full text
Year of Publication 07.12.2017
Patent
Semiconductor layout generation
Facchini Marco, Yao Shaoning, Azuma Atsushi, Culp James A, Cui Yuping
Year of Publication 05.12.2017
Get full text
Year of Publication 05.12.2017
Patent
Arc-resistant crackstop
POLOMOFF, NICHOLAS A, YAO, SHAONING, MCGAHAY, VINCENT J, ARORA, ANUPAM
Year of Publication 01.09.2019
Get full text
Year of Publication 01.09.2019
Patent
Deep trench crackstops under contacts
MCGAHAY VINCENT J, YAO SHAONING, CLEVENGER LAWRENCE A, NITTA SATYANARAYANA V, ANGYAL MATTHEW S
Year of Publication 07.08.2012
Get full text
Year of Publication 07.08.2012
Patent