Power matching to pulsed inductively coupled plasmas
Qu, Chenhui, Lanham, Steven J., Shannon, Steven C., Nam, Sang Ki, Kushner, Mark J.
Published in Journal of applied physics (07.04.2020)
Published in Journal of applied physics (07.04.2020)
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Journal Article
Electron neutral collision frequency measurement with the hairpin resonator probe
Peterson, David J, Kraus, Philip, Chua, Thai Cheng, Larson, Lynda, Shannon, Steven C
Published in Plasma sources science & technology (07.08.2017)
Published in Plasma sources science & technology (07.08.2017)
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Journal Article
Amorphization resistance of nano-engineered SiC under heavy ion irradiation
Imada, Kenta, Ishimaru, Manabu, Xue, Haizhou, Zhang, Yanwen, Shannon, Steven C., Weber, William J.
Published in Journal of nuclear materials (01.09.2016)
Published in Journal of nuclear materials (01.09.2016)
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Journal Article
The MOOSE electromagnetics module
Icenhour, Casey T., Lindsay, Alexander D., Permann, Cody J., Martineau, Richard C., Green, David L., Shannon, Steven C.
Published in SoftwareX (01.02.2024)
Published in SoftwareX (01.02.2024)
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Journal Article
Time-Resolved Electron Density Measurement Characterization of E-H Modes for Inductively Coupled Plasma Instabilities
Coumou, David J., Smith, Shaun, Toe, Aung, White, Scott, Shannon, Steven C., Brandon, Joel, Ford, Kristopher
Published in 2018 IEEE International Conference on Plasma Science (ICOPS) (24.06.2018)
Published in 2018 IEEE International Conference on Plasma Science (ICOPS) (24.06.2018)
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Conference Proceeding
Doppler-free, Stark broadened profiles at low plasma densities in helium
Zafar, Abdullah, Martin, Elijah, Shannon, Steven C.
Published in Journal of quantitative spectroscopy & radiative transfer (28.03.2019)
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Published in Journal of quantitative spectroscopy & radiative transfer (28.03.2019)
Journal Article
Power matching to pulsed inductively coupled plasmas
Qu, Chenhui, Lanham, Steven J., Shannon, Steven C., Nam, Sang Ki, Kushner, Mark J.
Published in Journal of applied physics (06.04.2020)
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Published in Journal of applied physics (06.04.2020)
Journal Article
Electron density uniformity commensurate with B-dot uniformity verification measurements for a phase-locked, RF distributed current source control system
Coumou, David J., Shannon, Steven C.
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
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Conference Proceeding
The MOOSE electromagnetics module
Icenhour, Casey T., Lindsay, Alexander D., Permann, Cody J., Martineau, Richard C., Green, David L., Shannon, Steven C.
Published in SoftwareX (26.12.2023)
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Published in SoftwareX (26.12.2023)
Journal Article
Dose dependence of helium bubble formation in nano-engineered SiC at 700 °C
Chen, C.-H., Zhang, Y., Wang, Y., Crespillo, M.L., Fontana, C.L., Graham, J.T., Duscher, G., Shannon, S.C., Weber, W.J.
Published in Journal of nuclear materials (15.04.2016)
Published in Journal of nuclear materials (15.04.2016)
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Journal Article
PROCESS FOR REMOVING MATERIALS FROM ONE OR MORE SUBSTRATES
SHANNON STEVEN C, HOFFMAN DANIEL J, PIPITONE JOHN A, MEHTA VINEET H, MILLER KEITH A, PARKHE VIJAY D, BROWN KARL M
Year of Publication 16.08.2012
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Year of Publication 16.08.2012
Patent
PLASMA CHAMBER HAVING MULTIPLE RF SOURCE FREQUENCIES FOR PROCESSING SEMICONDUCTOR SUBSTRATES
GRIMARD, DENNIS S, YE, YAN, MA, DIANA X, HOFFMAN, DANIEL J, PATERSON, ALEXANDER, SHANNON, STEVEN C, TAKAKURA, KEIKO, PANAGOPOULOS, THEODOROS, YANG, JANG GYOO
Year of Publication 21.02.2005
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Year of Publication 21.02.2005
Patent