Multilayer dispersion optics for X-ray radiation
Andreev, S.S, Mertins, H.-Ch, Platonov, Yu.Ya, Salashchenko, N.N, Schaefers, F, Shamov, E.A, Shmaenok, L.A
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.06.2000)
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Short-period X-ray multilayers based on Cr/Sc, W/Sc
Salashchenko, N.N., Fraerman, A.A., Mitenin, S.V., Prokhorov, K.A., Shamov, E.A.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.03.1998)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.03.1998)
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Multilayer coated reflective optics for Extreme UV lithography
Louis, E., Voorma, H.-J., Koster, N.B., Bijkerk, F., Platonov, Yu.Ya, Zuev, S.Yu, Andreev, S.S., Shamov, E.A., Salashchenko, N.N.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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