DECODING DEVICE AND METHOD FOR PREDICTING BLOCK PARTITIONED INTO RANDOM SHAPES
BYEON, Joo Hyung, SIM, Dong Gyu, PARK, Seung Wook, LEE, Jong Seok, LIM, Wha Pyeong
Year of Publication 20.12.2023
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Year of Publication 20.12.2023
Patent
The prediction of aerial image and CD variation due to imperfect mask in extreme ultraviolet lithography
Jong-Hoi Kim, Sang-Jin Lee, Joo-Heon Lee, Young-Keun Kwon, Myung-Sul Lee, Seung-Wook Park, Il-Sin An, Hye-Keun Oh
Published in Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference (2003)
Published in Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference (2003)
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Conference Proceeding