개선된 쉴드 구성들을 사용하여 기판을 프로세싱하기위한 방법들 및 장치
XUE YUAN, SANGLE ABHIJEET LAXMAN, SHARMA VIJAY BHAN, PAI UDAY, SETH SURESH CHAND, CHANNARAYAPATNA PUTTANNA NAVEEN, RAMAKRISHNAN BHARATWAJ, JEMBULINGAM SOUNDARRAJAN, KADAM ANKUR, YANG YI
Year of Publication 29.08.2023
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Year of Publication 29.08.2023
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H2 플라즈마를 사용하는 유동성 막 경화
NEMANI SRINIVAS D, JIANG SHISHI, SETH SURESH CHAND, MANNA PRAMIT, MALLICK ABHIJIT BASU
Year of Publication 12.11.2020
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Year of Publication 12.11.2020
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챔버 부품 보호용 옥시-플루오라이드 화합물들
DEEPAK NITIN, SETH SURESH CHAND, NATU GAYATRI, GORADIA PRERNA SONTHALIA, BAJAJ GEETIKA, THAKARE DARSHAN, SUN JENNIFER Y
Year of Publication 06.08.2021
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Year of Publication 06.08.2021
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더 양호한 바이오센서 성능을 위한 자연 산화물 제거 및 유전체 산화물들의 재성장을 위한 방법, 물질들 및 프로세스
ARNEPALLI RANGA RAO, NARWANKAR PRAVIN K, SCUDDER LANCE A, NEIKIRK COLIN COSTANO, MELNIK YURIY, SETH SURESH CHAND, CHATTERJEE SUKTI
Year of Publication 06.05.2020
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Year of Publication 06.05.2020
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Flowable film curing using H2 plasma
Manna, Pramit, Nemani, Srinivas D, Jiang, Shishi, Mallick, Abhijit Basu, Seth, Suresh Chand
Year of Publication 06.08.2024
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Year of Publication 06.08.2024
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Deposition Of Piezoelectric Films
Sangle, Abhijeet Laxman, Sharma, Vijay Bhan, Xue, Yuan, Yang, Yi, Kadam, Ankur Anant, Ramakrishnan, Bharatwaj, Seth, Suresh Chand
Year of Publication 04.04.2024
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Year of Publication 04.04.2024
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DEPOSITION OF PIEZOELECTRIC FILMS
KADAM, Ankur Anant, YANG, Yi, SETH, Suresh Chand, RAMAKRISHNAN, Bharatwaj, SANGLE, Abhijeet Laxman, XUE, Yuan, SHARMA, Vijay Bhan
Year of Publication 22.11.2023
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Year of Publication 22.11.2023
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METHOD OF MANUFACTURING ALUMINUM NITRIDE FILMS
KADAM, Ankur Anant, SETH, Suresh Chand, RAMAKRISHNAN, Bharatwaj, SANGLE, Abhijeet Laxman, SHARMA, Vijay Bhan
Year of Publication 06.10.2022
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Year of Publication 06.10.2022
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METHOD OF MANUFACTURING ALUMINUM NITRIDE FILMS
Sangle, Abhijeet Laxman, Sharma, Vijay Bhan, Kadam, Ankur Anant, Seth, Suresh Chand, Ramakrishnan, Bharatwaj
Year of Publication 06.10.2022
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Year of Publication 06.10.2022
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Method, materials and process for native oxide removal and regrowth of dielectric oxides for better biosensor performance
Melnik, Yuriy, Neikirk, Colin Costano, Chatterjee, Sukti, Scudder, Lance A, Arnepalli, Ranga Rao, Narwankar, Pravin K, Seth, Suresh Chand
Year of Publication 07.03.2023
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Year of Publication 07.03.2023
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METHOD OF FORMING A HALIDE-CONTAINING PEROVSKITE FILM
KADAM, Ankur Anant, PANDEY, Richa, RAO, Valipe Ramgopal, SETH, Suresh Chand, KABRA, Dinesh, SANGLE, Abhijeet Laxman, SHARMA, Vijay Bhan
Year of Publication 20.10.2022
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Year of Publication 20.10.2022
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Method Of Forming A Halide-Containing Perovskite Film
Pandey, Richa, Sangle, Abhijeet Laxman, Sharma, Vijay Bhan, Kabra, Dinesh, Rao, Valipe Ramgopal, Kadam, Ankur Anant, Seth, Suresh Chand
Year of Publication 13.10.2022
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Year of Publication 13.10.2022
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DEPOSITION OF PIEZOELECTRIC FILMS
KADAM, Ankur Anant, YANG, Yi, SETH, Suresh Chand, RAMAKRISHNAN, Bharatwaj, SANGLE, Abhijeet Laxman, XUE, Yuan, SHARMA, Vijay Bhan
Year of Publication 21.07.2022
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Year of Publication 21.07.2022
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Method of forming a fluorinated metal film
Bajaj, Geetika, Thakare, Darshan, Goradia, Prerna Sonthalia, Natu, Gayatri, Sun, Jennifer Y, Deepak, Nitin, Seth, Suresh Chand
Year of Publication 19.07.2022
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Year of Publication 19.07.2022
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FLOWABLE FILM CURING USING H2 PLASMA
MANNA, Pramit, SETH, Suresh Chand, MALLICK, Abhijit Basu, NEMANI, Srinivas D, JIANG, Shishi
Year of Publication 28.01.2021
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Year of Publication 28.01.2021
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METHOD, MATERIALS AND PROCESS FOR NATIVE OXIDE REMOVAL AND REGROWTH OF DIELECTRIC OXIDES FOR BETTER BIOSENSOR PERFORMANCE
ARNEPALLI, Ranga Rao, CHATTERJEE, Sukti, MELNIK, Yuriy, NARWANKAR, Pravin K, SCUDDER, Lance A, SETH, Suresh Chand, NEIKIRK, Colin Costano
Year of Publication 03.11.2021
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Year of Publication 03.11.2021
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FLOWABLE FILM CURING USING H2 PLASMA
MANNA, Pramit, SETH, Suresh Chand, MALLICK, Abhijit Basu, NEMANI, Srinivas D, JIANG, Shishi
Year of Publication 29.10.2020
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Year of Publication 29.10.2020
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METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHIELD CONFIGURATIONS
CHANNARAYAPATNA PUTTANNA, Naveen, YANG, Yi, SETH, Suresh Chand, PAI, Uday, RAMAKRISHNAN, Bharatwaj, SANGLE, Abhijeet Laxman, XUE, Yuan, KADAM, Ankur, SHARMA, Vijay Bhan, JEMBULINGAM, Soundarrajan
Year of Publication 14.07.2022
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Year of Publication 14.07.2022
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