A Study of Thin Foil Explosion
Shelkovenko, Tatiana A., Pikuz, Sergey A., Tilikin, Ivan N., Romanova, Vera M., Mishin, Sergey N., Atoyan, Levon, Hammer, David A.
Published in IEEE transactions on plasma science (01.11.2018)
Published in IEEE transactions on plasma science (01.11.2018)
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Journal Article
Algorithm for creation of automated systems in protected performance
Kadnova, Aizhana M., Makarov, Oleg Yu, Mishin, Sergey A., Rogozin, Evgeniy A.
Published in Bezopasnostʹ informat͡s︡ionnykh tekhnologiĭ (01.12.2019)
Published in Bezopasnostʹ informat͡s︡ionnykh tekhnologiĭ (01.12.2019)
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Journal Article
Method of controlling coupling coefficient of Aluminum Scandium Nitride deposition in high volume production
Mishin, Sergey, Gutkin, Michael, Bizyukov, Alexander, Sleptsov, Vladimir
Published in 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (01.07.2013)
Published in 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (01.07.2013)
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Conference Proceeding
Optimizing high concentration Scandium Aluminum Nitride films
Mishin, Sergey, Oshmyansky, Yury
Published in 2023 IEEE International Ultrasonics Symposium (IUS) (03.09.2023)
Published in 2023 IEEE International Ultrasonics Symposium (IUS) (03.09.2023)
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Conference Proceeding
Reducing Impact of Stress on Coupling Coefficient in 30% Scandium Aluminum Nitride Films
Mishin, Sergey, Oshmyansky, Yury
Published in 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) (15.05.2023)
Published in 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) (15.05.2023)
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Conference Proceeding
Characterization of reversed c-axis AlN thin films
Larson, John D., Mishin, Sergey, Bader, Stefan
Published in 2010 IEEE International Ultrasonics Symposium (01.10.2010)
Published in 2010 IEEE International Ultrasonics Symposium (01.10.2010)
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Conference Proceeding
Magnetron Deposition of AlN and ScAlN for Mass-production for BAW Devices and MEMS
Mishin, Sergey, Oshmyansky, Yury
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
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Conference Proceeding
Stress Control for Highly Doped Aluminum Scandium Nitride Films
Mishin, Sergey, Oshmyansky, Yury
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
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Conference Proceeding
Investigation of 20% scandium-doped aluminum nitride films for MEMS laterally vibrating resonators
Colombo, Luca, Kochhar, Abhay, Changting Xu, Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
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Conference Proceeding
Improving coupling coefficient distribution on BAW filters manufactured on 200mm wafers
Mishin, Sergey, Oshmyansky, Yury
Published in 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) (01.07.2017)
Published in 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) (01.07.2017)
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Conference Proceeding
Improving manufacturability of FBAR filters on 200mm wafers
Mishin, Sergey, Oshmyansky, Yury
Published in 2016 IEEE International Frequency Control Symposium (IFCS) (01.05.2016)
Published in 2016 IEEE International Frequency Control Symposium (IFCS) (01.05.2016)
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Conference Proceeding
Super High Frequency Simple Process Flow Cross-Sectional Lamé Mode Resonators in 20% Scandium-Doped Aluminum Nitride
Schaffer, Zachary A., Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
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Conference Proceeding
Investigation of initial stage of hybrid X pinches
Tilikin, Ivan N., Dimitriev, Artem S., Mingaleev, Albert R., Mishin, Sergey N., Romanova, Vera M., Ter-Oganesyan, Aleksey E., Shelkovenko, Tatiana A., Pikuz, Sergey A., Hoyt, Cad L., Gourdain, Pierre A., Cahill, Adam D., Greenly, John B., Hammer, David A.
Published in 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) (01.06.2013)
Published in 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) (01.06.2013)
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Conference Proceeding
Dynamics of hybrid X pinches
Shelkovenko, Tatiana A., Pikuz, Sergey A., Hoyt, Cad L., Cahill, Adam D., Hammer, David A., Tilikin, Ivan N., Dimitriev, Artem S., Mingaleev, Albert R., Ivanenkov, Georgy V., Mishin, Sergey N.
Published in 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) (01.06.2013)
Published in 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) (01.06.2013)
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Conference Proceeding
Improving manufacturability of bulk acoustic wave and surface acoustic wave devices
Mishin, S.
Published in 2011 Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA) (01.12.2011)
Published in 2011 Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA) (01.12.2011)
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Conference Proceeding
Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators
Schaffer, Zachary A., Colombo, Luca, Kochhar, Abhay S., Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
Investigation of 20% Scandium-doped Aluminum Nitride films for MEMS laterally vibrating resonators
Colombo, Luca, Kochhar, Abhay, Changting Xu, Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
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Conference Proceeding