Wafer-Scale Atomic-Layer-Deposition of Er3+- and Yb3+- Doped Gain Materials for Integrated Photonics
Liapis, Andreas C., Pelgrin, Vincent, Liu, Peng, Cui, Xiaoqi, Rosa, Jose M.A., Seppannen, Heli, Li, Diao, Reduto, Igor, Honkanen, Seppo, Lipsanen, Harri, Sun, Zhipei
Published in 2023 Conference on Lasers and Electro-Optics (CLEO) (01.05.2023)
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Published in 2023 Conference on Lasers and Electro-Optics (CLEO) (01.05.2023)
Conference Proceeding