Loading…
Loading…
Kanban Feedback Control for Wafer Delay Regulation of Cluster Tools
Roh, Dong-Hyun, Lee, Tae-Eog, Martinez, Claude
Published in IEEE transactions on automation science and engineering (01.01.2025)
Published in IEEE transactions on automation science and engineering (01.01.2025)
Get full text
Journal Article
Loading…
Loading…
Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation
Qiao, Yan, Wu, NaiQi, Yang, FaJun, Zhou, MengChu, Zhu, QingHua
Published in IEEE transactions on systems, man, and cybernetics. Systems (01.04.2018)
Published in IEEE transactions on systems, man, and cybernetics. Systems (01.04.2018)
Get full text
Journal Article
Loading…
Self assured Deep Learning with Minimum Pre Labeled Data for Wafer Pattern Classification
Fan, Shu-Kai S., Tsai, Du-Ming, Shih, Ya-Fang
Published in IEEE transactions on semiconductor manufacturing (01.08.2023)
Published in IEEE transactions on semiconductor manufacturing (01.08.2023)
Get full text
Journal Article
Loading…
Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages
Song, Fazhi, Cui, Ning, Chen, Shuaiqi, Zhang, Kai, Liu, Yang, Chen, Xinkai, Tan, Jiubin
Published in IEEE/CAA journal of automatica sinica (01.01.2025)
Published in IEEE/CAA journal of automatica sinica (01.01.2025)
Get full text
Journal Article
Loading…
A Distance-Based Health Indicator and Its Use in an Interacting Multiple Model for Failure Prognosis in Power Electronic Devices
Yang, Qian, Joshi, Shailesh, Viviano, Raymond, Ukegawa, Hiroshi, Pattipati, Krishna R.
Published in IEEE transactions on reliability (04.02.2025)
Published in IEEE transactions on reliability (04.02.2025)
Get full text
Journal Article
Loading…
Intrinsic Mechanism of Mobility Collapse in Short MOSFETs
Cristoloveanu, Sorin, Ghibaudo, Gerard
Published in IEEE transactions on electron devices (01.10.2021)
Published in IEEE transactions on electron devices (01.10.2021)
Get full text
Journal Article
Loading…
Loading…
Loading…
Loading…
Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing
Fan, Shu-Kai S., Hsu, Chia-Yu, Tsai, Du-Ming, Chou, Mabel C., Jen, Chih-Hung, Tsou, Jen-Hsuan
Published in IEEE transactions on automation science and engineering (01.07.2022)
Published in IEEE transactions on automation science and engineering (01.07.2022)
Get full text
Journal Article
Loading…
Characterizing Thermal Background Events for Athena X-IFU
Hull, S. V., Adams, J. S., Bandler, S. R., Beaumont, S., Chervenak, J. A., Cumbee, R., Finkbeiner, F. M., Ha, J. Y., Kelley, R. L., Kilbourne, C. A., Porter, F. S., Sakai, K., Smith, S. J., Wakeham, N. A., Wassell, E. J., Yoon, S. H.
Published in IEEE transactions on applied superconductivity (01.08.2023)
Published in IEEE transactions on applied superconductivity (01.08.2023)
Get full text
Journal Article
Loading…
Fast Simulator for the Estimation of Inverter DC-link Temperature in e-Drives Subjected to Highly Variable Working Cycles
Giuffrida, Simone, Mandrile, Fabio, Bojoi, Radu
Published in Conference proceedings - IEEE Applied Power Electronics Conference and Exposition (16.03.2025)
Published in Conference proceedings - IEEE Applied Power Electronics Conference and Exposition (16.03.2025)
Get full text
Conference Proceeding
Loading…
Compact Model for Carbon Nanotube Field-Effect Transistors Including Nonidealities and Calibrated With Experimental Data Down to 9-nm Gate Length
Jieying Luo, Lan Wei, Chi-Shuen Lee, Franklin, A. D., Ximeng Guan, Pop, E., Antoniadis, D. A., Wong, H. P.
Published in IEEE transactions on electron devices (01.06.2013)
Published in IEEE transactions on electron devices (01.06.2013)
Get full text
Journal Article
Loading…
A Structure Data-Driven Framework for Virtual Metrology Modeling
Yang, Wei-Ting, Blue, Jakey, Roussy, Agnes, Pinaton, Jacques, Reis, Marco S.
Published in IEEE transactions on automation science and engineering (01.07.2020)
Published in IEEE transactions on automation science and engineering (01.07.2020)
Get full text
Journal Article
Loading…
Demand Modeling With Forecast Evolution: An Application to Production Planning
Albey, Erinc, Norouzi, Amirhosein, Kempf, Karl G., Uzsoy, Reha
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)
Published in IEEE transactions on semiconductor manufacturing (01.08.2015)
Get full text
Journal Article