Micro-structural evaluation of Ti/Al/Ni/Au ohmic contacts with different Ti/Al thicknesses in AlGaN/GaN HEMTs
Mahajan, Somna S., Dhaul, Anuradha, Laishram, Robert, Kapoor, Sonalee, Vinayak, Seema, Sehgal, B.K.
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.04.2014)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.04.2014)
Get full text
Journal Article
GaN etch rate and surface roughness evolution in Cl2/Ar based inductively coupled plasma etching
Rawal, D.S., Arora, Henika, Agarwal, V.R., Vinayak, Seema, Kapoor, Ashok, Sehgal, B.K., Muralidharan, R., Saha, Dipankar, Malik, H.K.
Published in Thin solid films (01.10.2012)
Published in Thin solid films (01.10.2012)
Get full text
Journal Article
Study of inductively coupled Cl2/BCl3 plasma process for high etch rate selective etching of via-holes in GaAs
Rawal, D.S., Agarwal, V.R., Sharma, H.S., Sehgal, B.K., Muralidharan, R., Malik, Hitendra K.
Published in Vacuum (24.09.2010)
Published in Vacuum (24.09.2010)
Get full text
Journal Article
Study of Cl2/BCl3 inductively coupled plasma for selective etching of GaAs
Rawal, D.S., Malik, H.K., Sehgal, B.K., Muralidharan, R.
Published in 2009 IEEE International Conference on Plasma Science - Abstracts (01.06.2009)
Published in 2009 IEEE International Conference on Plasma Science - Abstracts (01.06.2009)
Get full text
Conference Proceeding
Thermal reliability of n-GaAs/Ti/Pt/Au Schottky contacts with thin Ti films for reduced gate resistance
Sehgal, B.K., Bhattacharya, B., Vinayak, Seema, Gulati, Ramesh
Published in Thin solid films (30.09.1998)
Published in Thin solid films (30.09.1998)
Get full text
Journal Article
High temperature alloyed Ag based ohmic contacts to pseudomorphic high electron mobility transistor (p-HEMT)
Mahajan, S.S., Tomer, A., Goyal, A., Vinayak, S., Sharma, H.S., Sehgal, B.K.
Published in 2008 International Conference on Recent Advances in Microwave Theory and Applications (01.11.2008)
Published in 2008 International Conference on Recent Advances in Microwave Theory and Applications (01.11.2008)
Get full text
Conference Proceeding
Silicon nitride films for passivation of pHEMT based MMIC
Daipuria, R., Dayal, S., Laishram, R., Mahajan, S., Rawal, D.S., Bhat, K.M., Sharma, H.S., Sehgal, B.K., Muralidharan, R.
Published in 2007 International Workshop on Physics of Semiconductor Devices (01.12.2007)
Published in 2007 International Workshop on Physics of Semiconductor Devices (01.12.2007)
Get full text
Conference Proceeding
Design And Fabrication Of GaAs 2-input Nor Gate
Harsh, Sehgal, B.K., Balakrishnan, V.R., Mohan, S., Naik, A.A., Agarwal, P., Gulati, R., Purohit, R.K., Chandra, I.
Published in The Fifth International Conference on VLSI Design (1992)
Published in The Fifth International Conference on VLSI Design (1992)
Get full text
Conference Proceeding