Low Cycle Fatigue of Thin Metal Films on Vibrating Silicon MEMS Cantilevers: Finite Element Modelling Facilitating Experimental Design
Pflugler, Nadine, Breitenreiner, Sebastian, Pufall, Reinhard, Wunderle, Bernhard
Published in 2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (25.04.2022)
Published in 2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (25.04.2022)
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Conference Proceeding
Low cycle fatigue of thin aluminium and copper layers and their susceptibility to corrosion
Sebastian, Breitenreiner, Nadine, Pflugler, Reinhard, Pufall, Bernhard, Wunderle
Published in 2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC) (13.09.2022)
Published in 2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC) (13.09.2022)
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Conference Proceeding
In-Situ Degradation Monitoring of Sputtered Thin Al Films on Si Cantilevers Inside SEM During Accelerated Stress Testing using Nano-Indenter Actuation and Vibration Loading
Johrmann, Nathanael, Osipova, Valentina, Breitenreiner, Sebastian, Pufall, Reinhard, Wunderle, Bernhard
Published in 2021 27th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) (23.09.2021)
Published in 2021 27th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) (23.09.2021)
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Conference Proceeding