Ion beam sputtering deposition of tungsten: Energy and mass effects of primary ions
Meyer, Françoise, Louchier, Daniel, Stambouli, Valérie, Pellet, Claude, Schwebel, Christian, Gautherin, Guy
Published in Applied surface science (01.09.1989)
Published in Applied surface science (01.09.1989)
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Journal Article
Characterization of ion-beam-sputtered tungsten films on silicon
Meyer, Françoise, Schwebel, Christian, Pellet, Claude, Gautherin, Guy
Published in Applied surface science (1989)
Published in Applied surface science (1989)
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Journal Article
Conference Proceeding