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The correlation between the breakdown voltage of power devices passivated by semi-insulating polycrystalline silicon and the effective density of interface charges
by
Burte, E.P.
,
Schulze
,
G.H
.
Published in
IEEE transactions on electron devices
(01.06.1991)
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applied sciences
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engineering
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physics
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annealing
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applied sciences
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capacitance measurement
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capacitance-voltage characteristics
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capacitors
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current measurement
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