The top-down fabrication of a 3D-integrated, fully CMOS-compatible FET biosensor based on vertically stacked SiNWs and FinFETs
Buitrago, Elizabeth, Fernández-Bolaños, Montserrat, Rigante, Sara, Zilch, Christian F., Schröter, Nicole S., Nightingale, Adrian M., Ionescu, Adrian M.
Published in Sensors and actuators. B, Chemical (01.03.2014)
Published in Sensors and actuators. B, Chemical (01.03.2014)
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