Fluorescence Correlation Spectroscopic Studies of Particle Properties for Colloidal Ceria Abrasives Used in Chemical-Mechanical Planarization
Schorr, Donald K., Smith, Madison A., Rawat, Ashwani K., Carver, Colin T., Mansour, Moinpour, Remsen, Edward E.
Published in ECS transactions (01.01.2016)
Published in ECS transactions (01.01.2016)
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Journal Article
Fluorescence Correlation Spectroscopic Studies of Particle Properties for Colloidal Ceria Abrasives Used in Chemical-Mechanical Planarization
Schorr, Donald K., Smith, Madison A., Rawat, Ashwani K., Carver, Colin T., Moinpour, Mansour, Remsen, Edward E.
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
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Journal Article
Single-molecule spectroscopic analysis of adsorption phenomena on colloidal silica abrasives used in chemical-mechanical planarization slurries
Jacobson, Lauren M., Schorr, Donald K., Remsen, Edward E., Carver, Colin T., Rawat, Ashwani K., Moinpour, Mansour
Published in 2015 International Conference on Planarization/CMP Technology (ICPT) (01.09.2015)
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Published in 2015 International Conference on Planarization/CMP Technology (ICPT) (01.09.2015)
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