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Year of Publication 29.01.2019
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Year of Publication 21.06.2017
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Year of Publication 21.08.2024
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MULTI-MIRROR ARRAY
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Year of Publication 25.07.2024
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Year of Publication 25.07.2024
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REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY
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Year of Publication 21.02.2024
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Year of Publication 21.02.2024
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