Liquid-free, piezoresistive, SOI-based pressure sensor for high temperature measurements up to 400 °C
Ha-Duong Ngo, Mukhopadhyay, B., Thanh, V. C., Mackowiak, P., Schlichting, V., Obermeier, E., Lang, K-D, Giuliani, A., Drera, L., Arancio, D.
Published in 2012 IEEE Sensors (01.10.2012)
Published in 2012 IEEE Sensors (01.10.2012)
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Conference Proceeding
Capacitive differential pressure sensor with high overload capability using silicon/glass technology
Hein, S., Holzner, K., Schlichting, V., Obermeier, E., Barton, K.
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)
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Conference Proceeding