Solid-state structures, phase transitions, and thermochromism in polysilylene copolymers
Schilling, Frederic C, Lovinger, Andrew J, Davis, Don D, Bovey, Frank A, Zeigler, John M
Published in Macromolecules (01.05.1993)
Published in Macromolecules (01.05.1993)
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Journal Article
Novel co-sputtered fluorinated amorphous carbon films for sub-0.25 /spl mu/m low /spl kappa/ damascene multilevel interconnect applications
Zhu, W., Pai, C.S., Bair, H.E., Krautter, H.W., Opila, R.L., Dennis, B.S., Pinczuk, A., Chabal, Y.J., Grundmeier, G., Graebner, J.E., Cheung, K.P., Schilling, F.C., Case, C.B., Liu, R., Jin, S.
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
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Conference Proceeding