Reliability and failure in single crystal silicon MEMS devices
Neels, A., Dommann, A., Schifferle, A., Papes, O., Mazza, E.
Published in Microelectronics and reliability (01.08.2008)
Published in Microelectronics and reliability (01.08.2008)
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Journal Article
Conference Proceeding
Combined testing for MEMS characterization
Schifferle, A., Neels, A., Papes, O., Dommann, A., Mazza, E.
Published in Procedia engineering (2010)
Published in Procedia engineering (2010)
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Journal Article
Aging of MEMS – Correlation of Mechanical and Structural Properties
Neels, A., Bourban, G., Shea, H., Schifferle, A., Mazza, E., Dommann, A.
Published in Procedia chemistry (01.09.2009)
Published in Procedia chemistry (01.09.2009)
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Journal Article