Design of micromachines under uncertainty with the sample-average approximation method
GUARACAO, Jorge Mario MONSALVE, LANGA, Sergiu, STOLZ, Michael, MROSK, Andreas, KAISER, Bert, SCHENK, Harald
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2024)
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2024)
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Journal Article
Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion
Monsalve, Jorge M., Melnikov, Anton, Stolz, Michael, Mrosk, Andreas, Jongmanns, Marcel, Wall, Franziska, Langa, Sergiu, Marica-Bercu, Ioana, Brändel, Tim, Kircher, Marco, Schenk, Hermann A.G., Kaiser, Bert, Schenk, Harald
Published in Sensors and actuators. A. Physical. (01.10.2022)
Published in Sensors and actuators. A. Physical. (01.10.2022)
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Journal Article
Analog Spatial Light Modulators Based on Micromirror Arrays
Dauderstädt, Ulrike, Dürr, Peter, Gehner, Andreas, Wagner, Michael, Schenk, Harald
Published in Micromachines (Basel) (23.04.2021)
Published in Micromachines (Basel) (23.04.2021)
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Journal Article
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
Kaiser, Bert, Schenk, Hermann A. G., Ehrig, Lutz, Wall, Franziska, Monsalve, Jorge M., Langa, Sergiu, Stolz, Michael, Melnikov, Anton, Conrad, Holger, Schuffenhauer, David, Schenk, Harald
Published in Microsystems & nanoengineering (30.11.2022)
Published in Microsystems & nanoengineering (30.11.2022)
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Journal Article
A small-gap electrostatic micro-actuator for large deflections
Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam
Published in Nature communications (11.12.2015)
Published in Nature communications (11.12.2015)
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Journal Article
Highly integrable silicon micropumps using lateral electrostatic bending actuators
Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Ruffert, Christine, Jongmanns, Marcel, Schenk, Harald
Published in Microsystem technologies : sensors, actuators, systems integration (01.08.2024)
Published in Microsystem technologies : sensors, actuators, systems integration (01.08.2024)
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Journal Article
Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers
Monsalve, Jorge M., Melnikov, Anton, Kaiser, Bert, Schuffenhauer, David, Stolz, Michael, Ehrig, Lutz, Schenk, Hermann A. G., Conrad, Holger, Schenk, Harald
Published in IEEE/ASME transactions on mechatronics (01.10.2022)
Published in IEEE/ASME transactions on mechatronics (01.10.2022)
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Journal Article
Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald
Published in Micromachines (Basel) (18.04.2018)
Published in Micromachines (Basel) (18.04.2018)
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Journal Article
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David
Published in Microsystems & nanoengineering (07.10.2019)
Published in Microsystems & nanoengineering (07.10.2019)
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Journal Article
About stress in filled DRIE-trenches
Kaiser, Bert, Drabe, Christian, Graßhoff, Thomas, Conrad, Holger, Schenk, Harald
Published in Journal of micromechanics and microengineering (01.08.2015)
Published in Journal of micromechanics and microengineering (01.08.2015)
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Journal Article
Single crystal silicon micro mirrors
Schenk, Harald, Sandner, Thilo, Drabe, Christian, Klose, Thomas, Conrad, Holger
Published in Physica status solidi. C (01.03.2009)
Published in Physica status solidi. C (01.03.2009)
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Journal Article
유체의 체적 흐름과 상호 작용하는 MEMS 트랜스듀서 및 그 제조 방법
LANGA SERGIU, CONRAD HOLGER, SCHENK HARALD, KAISER BERT, GAUDET MATTHIEU, SCHIMMANZ KLAUS
Year of Publication 26.03.2018
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Year of Publication 26.03.2018
Patent
A resonantly excited 2D-micro-scanning-mirror with large deflection
Schenk, Harald, Dürr, Peter, Kunze, Detlef, Lakner, Hubert, Kück, Heinz
Published in Sensors and actuators. A, Physical (20.03.2001)
Published in Sensors and actuators. A, Physical (20.03.2001)
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Journal Article
Conference Proceeding
Micro Mirrors for High-speed Laser Deflection and Patterning
Schenk, Harald, Grahmann, Jan, Sandner, Thilo, Wagner, Michael, Dauderstädt, Ulrike, Schmidt, Jan-Uwe
Published in Physics procedia (2014)
Published in Physics procedia (2014)
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Journal Article
Large deflection micromechanical scanning mirrors for linear scans and pattern generation
Schenk, H., Durr, P., Haase, T., Kunze, D., Sobe, U., Lakner, H., Kuck, H.
Published in IEEE journal of selected topics in quantum electronics (01.09.2000)
Published in IEEE journal of selected topics in quantum electronics (01.09.2000)
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Journal Article