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"Schedel, Thorsten"
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"Schedel, Thorsten"
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PHOTOMASK ASSEMBLY WITH REFLECTIVE PHOTOMASK AND METHOD OF MANUFACTURING A REFLECTIVE PHOTOMASK
by
SCHEDEL THORSTEN
,
BENDER MARKUS
,
SCHENKE ANDREAS
Year of Publication
23.07.2020
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REFLECTIVE PHOTOMASK AND REFLECTION-TYPE MASK BLANK
by
SCHEDEL THORSTEN
,
BENDER MARKUS
Year of Publication
07.12.2016
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Photomask assembly with reflective photomask and method of manufacturing a reflective photomask
by
Schedel
,
Thorsten
,
Bender, Markus
,
Schenke, Andreas
Year of Publication
27.12.2022
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Reflective photomask and reflection-type mask blank
by
Schedel
,
Thorsten
,
Bender, Markus
Year of Publication
24.07.2018
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METHOD FOR CONTROLLING THE QUALITY OF A LITHOGRAPHIC STRUCTURING STEP
by
SCHEDEL THORSTEN
,
ZIMMERMANN JENS
,
SCHMIDT SEBASTIAN
Year of Publication
31.12.2002
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REFLECTIVE PHOTOMASK AND REFLECTION-TYPE MASK BLANK
by
Schedel Thorsten
,
Bender Markus
Year of Publication
20.04.2017
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Photomask Assembly with Reflective Photomask and Method of Manufacturing a Reflective Photomask
by
Schedel
,
Thorsten
,
Bender, Markus
,
Schenke, Andreas
Year of Publication
16.07.2020
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Reflektierende Fotomaske und Reflexionstyp-Maskenrohling
by
Schedel
,
Thorsten
,
Bender, Markus
Year of Publication
08.10.2020
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Photomask assembly with reflective photomask and method of manufacturing a reflective photomask
by
SCHEDEL
,
THORSTEN
,
SCHENKE, ANDREAS
,
BENDER, MARKUS
Year of Publication
11.08.2021
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Reflective photomask and a reflection-type mask blank correspnding the same
by
SCHEDEL
,
THORSTEN
,
BENDER, MARKUS
Year of Publication
21.10.2017
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Method for the preferred processing of workpieces of highest priority
by
SCHEDEL THORSTEN
Year of Publication
04.01.2007
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Photomask assembly with reflective photomask and method of manufacturing a reflective photomask
by
SCHEDEL
,
THORSTEN
,
SCHENKE, ANDREAS
,
BENDER, MARKUS
Year of Publication
16.11.2020
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Reflective photomask and a reflection-type mask blank corresponding the same
by
SCHEDEL
,
THORSTEN
,
BENDER, MARKUS
Year of Publication
16.02.2017
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FOTOMASKENANORDNUNG MIT REFLEKTIERENDER FOTOMASKE UND VERFAHREN ZUM HERSTELLEN EINER REFLEKTIERENDEN FOTOMASKE
by
Schedel
,
Thorsten
,
Bender, Markus
,
Schenke, Andreas
Year of Publication
16.07.2020
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REFLEKTIERENDE FOTOMASKE UND REFLEXIONSTYP-MASKENROHLING
by
Schedel
,
Thorsten
,
Bender, Markus
Year of Publication
01.12.2016
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Process for forming a matrix arrangement of exposure fields on an idealized semiconductor wafer in integrated circuit production compares peripheral parameters with a quality reference
by
SCHEDEL
,
THORSTEN
Year of Publication
15.04.2004
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Method for Enhancing the Adhesion of a Passivation Layer on a Semiconductor Device
by
SCHEDEL THORSTEN
,
BERGHOF VOLKER
Year of Publication
02.07.2009
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Method for adjusting a substrate in an appliance for carrying out exposure
by
Schedel
,
Thorsten
,
Rössiger, Martin
Year of Publication
24.07.2007
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Method for adjusting a substrate in an appliance for carrying out exposure
by
SCHEDEL THORSTEN
,
ROESSIGER MARTIN
Year of Publication
24.07.2007
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Method for exposing a semiconductor wafer
by
SCHEDEL
,
THORSTEN
,
SEIDEL, TORSTEN
Year of Publication
01.02.2007
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