Search Results - "Schauer, Reinhard" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

반도체 웨이퍼의 정면 상에 층의 성막 중에 방위 노치를 갖는 반도체 웨이퍼를 유지하는 서셉터, 및 이 서셉터를 사용하여 층을 성막하는 방법

반도체 웨이퍼의 정면 상에 층의 성막 중에 방위 노치를 갖는 반도체 웨이퍼를 유지하는 서셉터, 및 이 서셉터를 사용하여 층을 성막하는 방법

by SCHAUER REINHARD
Year of Publication 18.12.2019

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Patent

단결정 실리콘의 에피택셜하게 코팅된 반도체 웨이퍼 및 그 제조방법

단결정 실리콘의 에피택셜하게 코팅된 반도체 웨이퍼 및 그 제조방법

by SCHAUER REINHARD, HABERECHT JOERG
Year of Publication 12.02.2020

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Patent

증착 챔버 내에 에피택셜층을 갖는 반도체 웨이퍼를 제조하기 위한 방법, 에피택셜층을 갖는 반도체 웨이퍼를 제조하기 위한 장치, 및 에피택셜층을 갖는 반도체 웨이퍼

증착 챔버 내에 에피택셜층을 갖는 반도체 웨이퍼를 제조하기 위한 방법, 에피택셜층을 갖는 반도체 웨이퍼를 제조하기 위한 장치, 및 에피택셜층을 갖는 반도체 웨이퍼

by SCHAUER REINHARD, MOOS PATRICK
Year of Publication 18.07.2018

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Patent

SUSCEPTOR FOR HOLDING SEMICONDUCTOR WAFER HAVING ORIENTATION NOTCH, METHOD FOR DEPOSITING LAYER ON SEMICONDUCTOR WAFER, AND SEMICONDUCTOR WAFER

SUSCEPTOR FOR HOLDING SEMICONDUCTOR WAFER HAVING ORIENTATION NOTCH, METHOD FOR DEPOSITING LAYER ON SEMICONDUCTOR WAFER, AND SEMICONDUCTOR WAFER

by CHRISTIAN HAGER, SCHAUER REINHARD
Year of Publication 18.05.2017

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Patent

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER HAVING ORIENTATION NOTCH A METHOD FOR DEPOSITING A LAYER ON A SEMICONDUCTOR WAFER AND SEMICONDUCTOR WAFER

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER HAVING ORIENTATION NOTCH A METHOD FOR DEPOSITING A LAYER ON A SEMICONDUCTOR WAFER AND SEMICONDUCTOR WAFER

by SCHAUER REINHARD, HAGER CHRISTIAN
Year of Publication 10.05.2017

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Patent

반도체 웨이퍼의 전면에 에피택셜층을 퇴적시키기 위한 방법, 및 상기 방법을 수행하기 위한 디바이스

반도체 웨이퍼의 전면에 에피택셜층을 퇴적시키기 위한 방법, 및 상기 방법을 수행하기 위한 디바이스

by SCHAUER REINHARD, STEIN RENE, HABERECHT JOERG, HEINRICH STEPHAN
Year of Publication 17.01.2022

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Patent

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER WITH ORIENTATION NOTCH AND DEPOSITION METHOD

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER WITH ORIENTATION NOTCH AND DEPOSITION METHOD

by SCHAUER, Reinhard
Year of Publication 27.07.2022

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Patent

Observation of Extremely Low Defect Densities in Silicon Wafers

Observation of Extremely Low Defect Densities in Silicon Wafers

by Schmolke, Rüdiger, Gräf, Dieter, Kirchner, Ralf, Schauer, Reinhard, Werner, Norbert, Mayer, Erwin-Peter, Wagner, Peter
Published in Japanese Journal of Applied Physics (01.04.1999)

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Journal Article

Susceptor for holding a semiconductor wafer with an orientation notch during the deposition of a layer on a front side of the semiconductor wafer and method for depositing the layer by using the susceptor

Susceptor for holding a semiconductor wafer with an orientation notch during the deposition of a layer on a front side of the semiconductor wafer and method for depositing the layer by using the susceptor

by Schauer, Reinhard
Year of Publication 27.04.2021

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Patent

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER WITH AN ORIENTATION NOTCH DURING THE DEPOSITION OF A LAYER ON A FRONT SIDE OF THE SEMICONDUCTOR WAFER AND METHOD FOR DEPOSITING THE LAYER BY USING THE SUSCEPTOR

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER WITH AN ORIENTATION NOTCH DURING THE DEPOSITION OF A LAYER ON A FRONT SIDE OF THE SEMICONDUCTOR WAFER AND METHOD FOR DEPOSITING THE LAYER BY USING THE SUSCEPTOR

by SCHAUER, Reinhard
Year of Publication 19.11.2020

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Patent

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER HAVING AN ORIENTATION NOTCH AND SEPARATION PROCESS

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER HAVING AN ORIENTATION NOTCH AND SEPARATION PROCESS

by SCHAUER, Reinhard
Year of Publication 26.02.2020

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Patent

Method for producing a semiconductor wafer

Method for producing a semiconductor wafer

by SCHAUER REINHARD
Year of Publication 26.02.2001

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Patent

Epitaxially coated semiconductor wafer of monocrystalline silicon and method for production thereof

Epitaxially coated semiconductor wafer of monocrystalline silicon and method for production thereof

by Schauer, Reinhard, Haberecht, Joerg
Year of Publication 14.02.2023

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Patent

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER WITH AN ORIENTATION NOTCH DURING THE DEPOSITION OF A LAYER ON A FRONT SIDE OF THE SEMICONDUCTOR WAFER AND METHOD FOR DEPOSITING THE LAYER BY USING THE SUSCEPTOR

SUSCEPTOR FOR HOLDING A SEMICONDUCTOR WAFER WITH AN ORIENTATION NOTCH DURING THE DEPOSITION OF A LAYER ON A FRONT SIDE OF THE SEMICONDUCTOR WAFER AND METHOD FOR DEPOSITING THE LAYER BY USING THE SUSCEPTOR

by SCHAUER, Reinhard
Year of Publication 27.09.2019

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Patent

Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer

Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer

by Schauer, Reinhard, Hager, Christian
Year of Publication 05.07.2022

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Patent

Pattern-based reverse-engineering of design components

Pattern-based reverse-engineering of design components

by Keller, Rudolf K., Schauer, Reinhard, Robitaille, Sébastien, Pagé, Patrick
Published in Proceedings / International Conference on Software Engineering (1999)

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Conference Proceeding Journal Article

COATED SEMICONDUCTOR WAFER AND FABRICATING METHOD AND APPARATUS THEREOF TO FABRICATE SEMICONDUCTOR WAFER HAVING POLISHING OR ETCHED BACK SURFACE AND FRONT SURFACE COATED BY CVD

COATED SEMICONDUCTOR WAFER AND FABRICATING METHOD AND APPARATUS THEREOF TO FABRICATE SEMICONDUCTOR WAFER HAVING POLISHING OR ETCHED BACK SURFACE AND FRONT SURFACE COATED BY CVD

by SCHAUER, REINHARD, WERNER, NORBERT
Year of Publication 06.01.2005

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Patent

EPITAXIALLY COATED SEMICONDUCTOR WAFER OF MONOCRYSTALLINE SILICON AND METHOD FOR PRODUCTION THEREOF

EPITAXIALLY COATED SEMICONDUCTOR WAFER OF MONOCRYSTALLINE SILICON AND METHOD FOR PRODUCTION THEREOF

by SCHAUER, Reinhard, HABERECHT, Joerg
Year of Publication 25.03.2021

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Patent

METHOD FOR PRODUCING A SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER IN A DEPOSITION CHAMBER, APPARATUS FOR PRODUCING A SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER, AND SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER

METHOD FOR PRODUCING A SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER IN A DEPOSITION CHAMBER, APPARATUS FOR PRODUCING A SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER, AND SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER

by MOOS, Patrick, SCHAUER, Reinhard
Year of Publication 20.01.2021

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Patent

EPITAXIALLY COATED SEMICONDUCTOR WAFER OF MONOCRYSTALLINE SILICON AND METHOD FOR THE PRODUCTION THEREOF

EPITAXIALLY COATED SEMICONDUCTOR WAFER OF MONOCRYSTALLINE SILICON AND METHOD FOR THE PRODUCTION THEREOF

by SCHAUER, Reinhard, HABERECHT, Jörg
Year of Publication 03.06.2020

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Patent

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