Fast-cycle-time single-wafer IC manufacturing
Moslehi, Mehrdad M., Velo, Lino, Paranjpe, Ajit, Kuehne, John, Huang, Steve, Chapman, Richard, Schaper, Chuck, Breedijk, Terence, Najm, Habib, Yin, David, Lee, Yong Jin, Anderson, Dale, Davis, Cecil
Published in Microelectronic engineering (01.08.1994)
Published in Microelectronic engineering (01.08.1994)
Get full text
Journal Article
Conference Proceeding
Rapid Thermal Processing For Sub-Half-Micron CMOS IC Manufacturing
Moslehi, Chapman, Velo, Kuehne, Paranjpe, Schaper, Huang, Najm, Breedijk, Yin, Davis
Published in Symposium 1993 on VLSI Technology (1993)
Published in Symposium 1993 on VLSI Technology (1993)
Get full text
Conference Proceeding