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Source hollow body and EUV plasma light source comprising such a source hollow body
by
Schall
,
Sebastian
,
Czap, Almut
Year of Publication
31.07.2018
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SOURCE HOLLOW BODY AND EUV PLASMA LIGHT SOURCE COMPRISING SUCH A SOURCE HOLLOW BODY
by
Schall Sebastian
,
Czap Almut
Year of Publication
01.02.2018
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Quell-Hohlkörper sowie EUV-Plasma-Lichtquelle mit einem derartigen Quell-Hohlkörper
by
Schall
,
Sebastian
,
Czap, Almut
Year of Publication
07.12.2017
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chemistry
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electric techniques not otherwise provided for
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electricity
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production of accelerated electrically-charged particles or ofneutrons
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production or acceleration of neutral molecular or atomicbeams
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