High finesse microcavities in the optical telecom O-band
Fait, J., Putz, S., Wachter, G., Schalko, J., Schmid, U., Arndt, M., Trupke, M.
Published in Applied physics letters (29.11.2021)
Published in Applied physics letters (29.11.2021)
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Journal Article
Passive optomechanical electric field strength sensor with built-in vibration suppression
Kainz, A., Hortschitz, W., Steiner, H., Stifter, M., Schalko, J., Jachimowicz, A., Keplinger, F.
Published in Applied physics letters (01.10.2018)
Published in Applied physics letters (01.10.2018)
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Journal Article
Air damping as design feature in lateral oscillators
Kainz, A., Hortschitz, W., Schalko, J., Jachimowicz, A., Keplinger, F.
Published in Sensors and actuators. A. Physical. (01.12.2015)
Published in Sensors and actuators. A. Physical. (01.12.2015)
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Journal Article
An elevated temperature study of a Ti adhesion layer on polyimide
Taylor, A.A., Cordill, M.J., Bowles, L., Schalko, J., Dehm, G.
Published in Thin solid films (15.03.2013)
Published in Thin solid films (15.03.2013)
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Journal Article
Accurate analytical model for air damping in lateral MEMS/MOEMS oscillators
Kainz, A., Hortschitz, W., Steiner, H., Schalko, J., Jachimowicz, A., Keplinger, F.
Published in Sensors and actuators. A. Physical. (01.03.2017)
Published in Sensors and actuators. A. Physical. (01.03.2017)
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Journal Article
MOEMS transducer with a non-linear transfer characteristic for static displacement measurement applications on the example of an inclination sensor
Steiner, H., Hortschitz, W., Kainz, A., Stifter, M., Jachimowicz, A., Schalko, J., Keplinger, F., Kohl, F.
Published in Sensors and actuators. A. Physical. (15.08.2017)
Published in Sensors and actuators. A. Physical. (15.08.2017)
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Journal Article
Fracture and Delamination of Chromium Thin Films on Polymer Substrates
Cordill, M. J., Taylor, A., Schalko, J., Dehm, G.
Published in Metallurgical and materials transactions. A, Physical metallurgy and materials science (01.04.2010)
Published in Metallurgical and materials transactions. A, Physical metallurgy and materials science (01.04.2010)
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Journal Article
Conference Proceeding
Impact of auxiliary capacitively coupled plasma on the properties of ICP-CVD deposited a-SiNx:H thin films
Dergez, D., Schalko, J., Löffler, S., Bittner, A., Schmid, U.
Published in Sensors and actuators. A. Physical. (01.04.2015)
Published in Sensors and actuators. A. Physical. (01.04.2015)
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Journal Article
A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout
Riesch, C, Reichel, E K, Jachimowicz, A, Schalko, J, Hudek, P, Jakoby, B, Keplinger, F
Published in Journal of micromechanics and microengineering (01.07.2009)
Published in Journal of micromechanics and microengineering (01.07.2009)
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Journal Article
Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators
Hansal, Wolfgang E. G., Steiner, Harald, Mann, R., Halmdienst, M., Schalko, J., Keplinger, F., Svasek, P.
Published in Microsystem technologies (01.04.2014)
Published in Microsystem technologies (01.04.2014)
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Journal Article
Conference Proceeding
On the Stacking Behavior of Functionalized Single-Wall Carbon Nanotubes
Kukovecz, A, Kramberger, Ch, Holzinger, M, Kuzmany, H, Schalko, J, Mannsberger, M, Hirsch, A
Published in The journal of physical chemistry. B (27.06.2002)
Published in The journal of physical chemistry. B (27.06.2002)
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Journal Article
Nanotribological study of PECVD DLC and reactively sputtered Ti containing carbon films
Kvasnica, S., Schalko, J., Eisenmenger-Sittner, C., Benardi, J., Vorlaufer, G., Pauschitz, A., Roy, M.
Published in Diamond and related materials (01.10.2006)
Published in Diamond and related materials (01.10.2006)
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Journal Article
Optical MEMS vibration sensor
Hortschitz, W, Sachse, M, Steiner, H, Kohl, F, Sauter, T, Schalko, J, Keplinger, F
Published in 2010 IEEE Sensors (01.11.2010)
Published in 2010 IEEE Sensors (01.11.2010)
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Conference Proceeding
Nanoindentation and AFM studies of PECVD DLC and reactively sputtered Ti containing carbon films
Pauschitz, A, Schalko, J, Koch, T, Eisenmenger-Sittner, C, Kvasnica, S, Roy, Manish
Published in Bulletin of materials science (01.10.2003)
Published in Bulletin of materials science (01.10.2003)
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Journal Article
Impact of auxiliary capacitively coupled plasma on the properties of ICP-CVD deposited a-SiN sub(x):H thin films
Dergez, D, Schalko, J, Loffler, S, Bittner, A, Schmid, U
Published in Sensors and actuators. A. Physical. (01.04.2015)
Published in Sensors and actuators. A. Physical. (01.04.2015)
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Journal Article
FEM-basierte Analyse eines neuen thermischen Strömungssensors mit drei unterschiedlichen Betriebsmoden
Ćerimović, S, Talić, A, Kohl, F, Keplinger, F, Schalko, J, Jachimowicz, A
Published in Elektrotechnik und Informationstechnik (01.02.2009)
Published in Elektrotechnik und Informationstechnik (01.02.2009)
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Journal Article