Super High Frequency Simple Process Flow Cross-Sectional Lamé Mode Resonators in 20% Scandium-Doped Aluminum Nitride
Schaffer, Zachary A., Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Get full text
Conference Proceeding
Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators
Schaffer, Zachary A., Colombo, Luca, Kochhar, Abhay S., Piazza, Gianluca, Mishin, Sergey, Oshmyansky, Yury
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Get full text
Conference Proceeding