Surface acoustic wave devices and applications in liquid sensing
Leidl, A, Oberlack, I, Schaber, U, Mader, B, Drost, S
Published in Smart materials and structures (01.12.1997)
Published in Smart materials and structures (01.12.1997)
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Journal Article
Electrically removable, micromachined encapsulation for sensitive materials
Roth, M., Vogel, S., Schaber, U., Endres, H.-E.
Published in Sensors and actuators. A. Physical. (01.07.1997)
Published in Sensors and actuators. A. Physical. (01.07.1997)
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Journal Article
Bulk micromachining of Ge for IR gratings
Lang, W, Leancu, R, Schaber, U, Wiedamann, G, Käufl, H U
Published in Journal of micromechanics and microengineering (01.03.1996)
Published in Journal of micromechanics and microengineering (01.03.1996)
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Journal Article
Conference Proceeding
Anisotropic etching for optical gratings
Klumpp, A., Kühl, K., Schaber, U., Käufl, H.U., Lang, W.
Published in Sensors and actuators. A. Physical. (1995)
Published in Sensors and actuators. A. Physical. (1995)
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Journal Article
Bulk micromachining of germanium for IR gratings
Lang, W, Leancu, R, Schaber, U, Wiedamann, G, Kaufl, H U
Published in Journal of micromechanics and microengineering (03.09.1995)
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Published in Journal of micromechanics and microengineering (03.09.1995)
Journal Article
Electrostatic wafer handling for thin wafer processing
Landesberger, C., Wieland, R., Klumpp, A., Ramm, P., Drost, A., Schaber, U., Bonfert, D., Bock, K.
Published in 2009 European Microelectronics and Packaging Conference (01.06.2009)
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Published in 2009 European Microelectronics and Packaging Conference (01.06.2009)
Conference Proceeding