Towards alternative 3D nanofabrication in macroscopic working volumes
Kühnel, M, Fröhlich, T, Füßl, R, Hoffmann, M, Manske, E, Rangelow, I W, Reger, J, Schäffel, C, Sinzinger, S, Zöllner, J-P
Published in Measurement science & technology (01.11.2018)
Published in Measurement science & technology (01.11.2018)
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Journal Article
Passive 350 GHz Video Imaging Systems for Security Applications
Heinz, E., May, T., Born, D., Zieger, G., Anders, S., Zakosarenko, V., Meyer, H.-G., Schäffel, C.
Published in Journal of infrared, millimeter and terahertz waves (01.10.2015)
Published in Journal of infrared, millimeter and terahertz waves (01.10.2015)
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Journal Article
Design and performance evaluation of an interferometric controlled planar nanopositioning system
Hesse, S, Schäffel, C, Mohr, H-U, Katzschmann, M, Büchner, H-J
Published in Measurement science & technology (01.07.2012)
Published in Measurement science & technology (01.07.2012)
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Journal Article
Integrated Planar 6-DOF Nanopositioning System
Gorges, S., Hesse, S., Schäffel, C., Ortlepp, I., Manske, E., Langlotz, E., Dontsov, D.
Published in IFAC-PapersOnLine (01.01.2019)
Published in IFAC-PapersOnLine (01.01.2019)
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Journal Article
Electrostatic parallel-plate MEMS switch on silicon-ceramic-composite-substrates
Gropp, S., Frank, A., Fischer, M., Schaffel, C., Muller, J., Hoffmann, M.
Published in 2015 German Microwave Conference (01.03.2015)
Published in 2015 German Microwave Conference (01.03.2015)
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Conference Proceeding
Modeling of BAW filters for system level simulation
Karolewski, D., Schaffel, C., Tag, A., Silva Cortes, V., Hagelauer, A., Fischer, G.
Published in 2015 German Microwave Conference (01.03.2015)
Published in 2015 German Microwave Conference (01.03.2015)
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Conference Proceeding
Parameter identification of piezoelectric AlGaN/GaN beam resonators by dynamic measurements
Michael, S., Brueckner, K., Niebelschuetz, F., Tonisch, K., Schaffel, C.
Published in EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (01.04.2009)
Published in EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (01.04.2009)
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Conference Proceeding
Influence of temperature distribution on behavior, modeling, and reliability of BAW resonators
Tag, A., Weigel, R., Hagelauer, A., Bader, B., Huck, C., Pitschi, M., Wagner, K., Karolewski, D., Schaffel, C.
Published in 2014 IEEE International Reliability Physics Symposium (01.06.2014)
Published in 2014 IEEE International Reliability Physics Symposium (01.06.2014)
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Conference Proceeding
Stress identification of thin membrane structures by dynamic measurements
Michael, S., Schaffel, C., Voigt, S., Knechtel, R.
Published in 2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) (01.05.2011)
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Published in 2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) (01.05.2011)
Conference Proceeding