Importance of thermophysical properties of thin films in ultra-large-scale integrated circuits and beyond
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Journal Article
Implantation of 14N + into Monocrystalline GaN films
Saxena, A.N., Weisberg, L.R., Mann, W.B., Schima, F.J.
Published in The International journal of applied radiation and isotopes (1975)
Published in The International journal of applied radiation and isotopes (1975)
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The coupling of an N-well CMOS fabrication laboratory course with the SEMATECH Center of Excellence in Multilevel Metallization at Rensselaer
Price, D.T., Gutmann, R.J., Haley, N.J., Muraka, S.P., Saxena, A.N., Chow, T.P., RamKumar, K., Lakshminarayanan, S., Bhalla, A.
Published in [1993] Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium (1993)
Published in [1993] Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium (1993)
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