Low open-area endpoint detection using a PCA-based T2 statistic and Q statistic on optical emission spectroscopy measurements
White, D.A, Goodlin, B.E, Gower, A.E, Boning, D.S, Chen, H, Sawin, H.H, Dalton, T.J
Published in IEEE transactions on semiconductor manufacturing (01.05.2000)
Published in IEEE transactions on semiconductor manufacturing (01.05.2000)
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Journal Article
Low open-area endpoint detection using a PCA-based T/sup 2/ statistic and Q statistic on optical emission spectroscopy measurements
White, D.A., Goodlin, B.E., Gower, A.E., Boning, D.S., Chen, H., Sawin, H.H., Dalton, T.J.
Published in IEEE transactions on semiconductor manufacturing (01.05.2000)
Published in IEEE transactions on semiconductor manufacturing (01.05.2000)
Get full text
Journal Article
A statistical analysis of single and multiple response surface modeling
Smith, T.H., Goodlin, B.E., Boning, D.S., Sawin, H.H.
Published in IEEE transactions on semiconductor manufacturing (01.11.1999)
Published in IEEE transactions on semiconductor manufacturing (01.11.1999)
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Journal Article
Conference Proceeding
Plasma etch endpoint via interferometric imaging
Boning, D.S., Claman, J.L., Ka Shun Wong, Dalton, T.J., Sawin, H.H.
Published in Proceedings of 1994 American Control Conference - ACC '94 (1994)
Published in Proceedings of 1994 American Control Conference - ACC '94 (1994)
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Conference Proceeding