Test Structure of Bi-stable Spring towards TopoMEMS Ising Machine
Mita, Yoshio, Ezawa, Motohiko, Tsuji, Keigo, Lebrasseur, Eric, Sawamura, Tomoki, Tsuboi, Shinji, Mizushima, Ayako, Ochiai, Yukinori, Higo, Akio
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21.03.2022)
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21.03.2022)
Get full text
Conference Proceeding
A Micro Racetrack Optical Resonator Test Structure to Optimize Pattern Approximation in Direct Lithography Technologies
Higo, Akio, Sawamura, Tomoki, Fujiwara, Makoto, Ota, Etsuko, Mizushima, Ayako, Lebrasseur, Eric, Arakawa, Taro, Mita, Yoshio
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)
Get full text
Conference Proceeding
An Add-in Test Structure Chip to Unitedly Assess PVD Material Properties in University Open Nanotechnology Platform
Yasunaga, Shun, Misumi, Kei, Mizushima, Ayako, Toyokura, Atsushi, Ota, Etsuko, Inoue, Yurie, Fujiwara, Makoto, Kawai, Noriko, Yoda, Mitsuhiro, Tsuboi, Shinji, Sawamura, Tomoki, Higo, Akio, Nakane, Ryosho, Ochiai, Yukinori, Mita, Yoshio
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)
Get full text
Conference Proceeding
Operation of Arrayed Logic Elements for Mems Ising Machine
Yasunaga, Shun, Ezawa, Motohiko, Tsuji, Keigo, Misumi, Kei, Sawamura, Tomoki, Tsuboi, Shinji, Mizushima, Ayako, Ochiai, Yukinori, Higo, Akio, Mita, Yoshio
Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
Get full text
Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
Conference Proceeding
"MEMS de Piano"- an experimental course of design, fabrication, and testing of MEMS oscillator
Mita, Yoshio, Kubota, Masanori, Denoual, Matthieu, Lebrasseur, Eric, Sawamura, Tomoki
Published in 10th European Workshop on Microelectronics Education (EWME) (01.05.2014)
Published in 10th European Workshop on Microelectronics Education (EWME) (01.05.2014)
Get full text
Conference Proceeding