Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions
Savran, C.A., Sparks, A.W., Sihler, J., Jian Li, Wan-Chen Wu, Berlin, D.E., Burg, T.P., Fritz, J., Schmidt, M.A., Manalis, S.R.
Published in Journal of microelectromechanical systems (01.12.2002)
Published in Journal of microelectromechanical systems (01.12.2002)
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