Comparative study on atomic layer deposition of HfO 2 via substitution of ligand structure with cyclopentadiene
Park, Sungmin, Park, Bo-Eun, Yoon, Hwi, Lee, Sanghun, Nam, Taewook, Cheon, Taehoon, Kim, Soo-Hyun, Cheon, Hwansung, Im, Sangkyun, Seong, Taegeun, Kim, Hyungjun
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (30.01.2020)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (30.01.2020)
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Journal Article
Comparative study on atomic layer deposition of HfO2via substitution of ligand structure with cyclopentadiene
Park, Sungmin, Bo-Eun Park, Yoon, Hwi, Lee, Sanghun, Nam, Taewook, Cheon, Taehoon, Soo-Hyun, Kim, Cheon, Hwansung, Im, Sangkyun, Taegeun Seong, Kim, Hyungjun
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2020)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2020)
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Journal Article
Display module and manufacturing method thereof
Im, Sangkyun, Jang, Hyuntae, Roh, Sanghoon, Son, Jihyeon, Lee, Joowhan, Choi, Won
Year of Publication 14.11.2023
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Year of Publication 14.11.2023
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