Advanced DC-SF Cell Technology for 3-D NAND Flash
Aritome, S., Yoohyun Noh, Hyunseung Yoo, Eun Seok Choi, Han Soo Joo, Youngsoo Ahn, Byeongil Han, Sungjae Chung, Keonsoo Shim, Keunwoo Lee, Sanghyon Kwak, Sungchul Shin, Iksoo Choi, Sanghyuk Nam, Gyuseog Cho, Dongsun Sheen, Seungho Pyi, Jongmoo Choi, Sungkye Park, Jinwoong Kim, Seokkiu Lee, Sungjoo Hong, Sungwook Park, Kikkawa, T.
Published in IEEE transactions on electron devices (01.04.2013)
Published in IEEE transactions on electron devices (01.04.2013)
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Journal Article
A New Metal Control Gate Last process (MCGL process) for high performance DC-SF (Dual Control gate with Surrounding Floating gate) 3D NAND flash memory
Yoohyun Noh, Youngsoo Ahn, Hyunseung Yoo, Byeongil Han, Sungjae Chung, Keonsoo Shim, Keunwoo Lee, Sanghyon Kwak, Sungchul Shin, Iksoo Choi, Sanghyuk Nam, Gyuseog Cho, Dongsun Sheen, Seungho Pyi, Jongmoo Choi, Sungkye Park, Jinwoong Kim, Seokkiu Lee, Aritome, S., Sungjoo Hong, Sungwook Park
Published in 2012 Symposium on VLSI Technology (VLSIT) (01.06.2012)
Published in 2012 Symposium on VLSI Technology (VLSIT) (01.06.2012)
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Conference Proceeding
Development of High Selectivity Phosphoric Acid and its Application to Flash STI Pattern
Cho, Sunghyuk, Lee, Young Bang, Han, Ji Hye, Park, Hyung Soon, Kim, Hyung Hwan, Kwak, Sanghyon, Yang, Kihong, Hong, Kwon, Park, Sung Ki, Kang, Hyo Sang
Published in ECS transactions (27.04.2012)
Published in ECS transactions (27.04.2012)
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Journal Article