SiGe MEMS at processing temperatures below 250°C
El-Rifai, Joumana, Sedky, Sherif, Van Hoof, Rita, Severi, Simone, Lin, Dennis, Sangameswaran, Sandeep, Puers, Robert, Van Hoof, Chris, Witvrouw, Ann
Published in Sensors and actuators. A. Physical. (01.12.2012)
Published in Sensors and actuators. A. Physical. (01.12.2012)
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Journal Article
SiGe MEMS at processing temperatures below 250 degree C
El-Rifai, Joumana, Sedky, Sherif, Van Hoof, Rita, Severi, Simone, Lin, Dennis, Sangameswaran, Sandeep, Puers, Robert, Van Hoof, Chris, Witvrouw, Ann
Published in Sensors and actuators. A. Physical. (01.12.2012)
Published in Sensors and actuators. A. Physical. (01.12.2012)
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Journal Article
Impact of design factors and environment on the ESD sensitivity of MEMS micromirrors
Sangameswaran, Sandeep, Coster, Jeroen De, Groeseneken, Guido, Wolf, Ingrid De
Published in Microelectronics and reliability (01.09.2010)
Published in Microelectronics and reliability (01.09.2010)
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Journal Article
Conference Proceeding
ESD On-Wafer Characterization: Is TLP Still the Right Measurement Tool?
Scholz, M., Linten, D., Thijs, S., Sangameswaran, S., Sawada, M., Nakaei, T., Hasebe, T., Groeseneken, G.
Published in IEEE transactions on instrumentation and measurement (01.10.2009)
Published in IEEE transactions on instrumentation and measurement (01.10.2009)
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Journal Article
Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness
Sangameswaran, Sandeep, Cherman, V., De Coster, J., Witvrouw, A., Groeseneken, G., De Wolf, I.
Published in 2012 IEEE International Reliability Physics Symposium (IRPS) (01.04.2012)
Published in 2012 IEEE International Reliability Physics Symposium (IRPS) (01.04.2012)
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Conference Proceeding
Electronic packaging challenges for emerging devices
Sangameswaran, Sandeep, De Samber, Marc
Published in 2012 International Conference on Emerging Electronics (01.12.2012)
Published in 2012 International Conference on Emerging Electronics (01.12.2012)
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Conference Proceeding
Behavior of RF MEMS switches under ESD stress
Sangameswaran, S, De Coster, J, Cherman, V, Czarnecki, P, Linten, D, Scholz, M, Thijs, S, Groeseneken, G, De Wolf, I
Published in Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2010 (01.10.2010)
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Published in Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2010 (01.10.2010)
Conference Proceeding
Mechanical response of electrostatic actuators under ESD stress
Sangameswaran, S., De Coster, J., Linten, D., Scholz, M., Thijs, S., Van Hoof, C., De Wolf, I., Groeseneken, G.
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
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Conference Proceeding
ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors
Sangameswaran, S., De Coster, J., Linten, D., Scholz, M., Thijs, S., Haspeslagh, L., Witvrouw, A., Van Hoof, C., Groeseneken, G., De Wolf, I.
Published in EOS/ESD 2008 - 2008 30th Electrical Overstress/Electrostatic Discharge Symposium (01.09.2008)
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Published in EOS/ESD 2008 - 2008 30th Electrical Overstress/Electrostatic Discharge Symposium (01.09.2008)
Conference Proceeding