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Year of Publication 25.06.2009
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Year of Publication 01.05.2010
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Year of Publication 21.02.2008
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Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
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Year of Publication 22.08.2012
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Year of Publication 18.04.2012
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Year of Publication 13.04.2011
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Year of Publication 13.04.2011
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Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE, LERNER ALEXANDER N, SANGAM KEDARNATH, SORABJI KHURSHED, RANISH JOSEPH M
Year of Publication 08.12.2010
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Year of Publication 08.12.2010
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Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
NARWANKAR PRAVIN K, SHARANGAPANI RAHUL, SCHWARTZ MIRIAM, CHOI KENRIC, BHAT SANJAY, NGUYEN SON T, MUTHUKRISHNAN SHANKAR, SANGAM KEDARNATH, KHER SHREYAS, DEATON PAUL
Year of Publication 17.11.2005
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Year of Publication 17.11.2005
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Slit valve having increased flow uniformity
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Year of Publication 16.12.2009
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Year of Publication 16.12.2009
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Thermal reactor with improved gas flow distribution
LERNER, ALEXANDER N, NAVASCA, ROBERT, TJANDRA, AGUS, SANGAM, KEDARNATH, YOKOTA, YOSHITAKA, TSENG, MING KUEI (MICHAEL), TAM, NORMAN, BEHDJAT, MEDHRAN, RAMAMURTHY, SUNDAR
Year of Publication 11.06.2012
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Year of Publication 11.06.2012
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Thermal reactor with improved gas flow distribution
NAVASCA ROBERT, TAM NORMAN, LERNER ALEXANDER N, TJANDRA AGUS, SANGAM KEDARNATH, TSENG MING-KUEI MICHAEL, RAMAMURTHY SUNDAR, YOKOTA YOSHITAKA, BEHDJAT MEDHRAN
Year of Publication 30.05.2012
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Year of Publication 30.05.2012
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Thermal reactor with improved gas flow distribution
NAVASCA ROBERT, TAM NORMAN, LERNER ALEXANDER N, TJANDRA AGUS, SANGAM KEDARNATH, TSENG MING-KUEI MICHAEL, RAMAMURTHY SUNDAR, YOKOTA YOSHITAKA, BEHDJAT MEDHRAN
Year of Publication 24.11.2010
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Year of Publication 24.11.2010
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Thermal reactor with improved gas flow distribution
LERNER, ALEXANDER N, NAVASCA, ROBERT, TJANDRA, AGUS, SANGAM, KEDARNATH, YOKOTA, YOSHITAKA, TAM, NORMAN, BEHDJAT, MEDHRAN, RAMAMURTHY, SUNDAR, TSENG, (MICHAEL) MING-KUEI
Year of Publication 16.10.2009
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Year of Publication 16.10.2009
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