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Year of Publication 08.03.2012
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Year of Publication 08.03.2012
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Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE, LERNER ALEXANDER N, SANGAM KEDARNATH, SORABJI KHURSHED, RANISH JOSEPH M
Year of Publication 15.11.2011
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Year of Publication 15.11.2011
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Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE, LERNER ALEXANDER N, SANGAM KEDARNATH, SORABJI KHURSHED, RANISH JOSEPH M
Year of Publication 15.11.2011
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Year of Publication 15.11.2011
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Year of Publication 20.03.2014
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Year of Publication 20.03.2014
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Rapid thermal processing lamphead with improved cooling
SANGAM, KEDARNATH, LERNER, ALEXANDER, SORABJI, KHURSHED, RANISH, JOSEPH M
Year of Publication 21.06.2015
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Year of Publication 21.06.2015
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Thermal reactor with improved gas flow distribution
TSENG MING-KUEI (MICHAEL), NAVASCA ROBERT, TAM NORMAN, LERNER ALEXANDER N, TJANDRA AGUS, SANGAM KEDARNATH, RAMAMURTHY SUNDAR, BEHDJAT MEHRAN, YOKOTA YOSHITAKA
Year of Publication 17.12.2013
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Year of Publication 17.12.2013
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THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
TSENG MING-KUEI (MICHAEL), ALEXANDER N LERNER, MEHRAN BEHDJAT, NORMAN TAM, SUNDAR RAMAMURTHY, YOKOTA YOSHITAKA, ROBERT NAVASCA, KEDARNATH SANGAM, AGUS TJANDRA
Year of Publication 24.10.2013
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Year of Publication 24.10.2013
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Rapid thermal processing lamphead with improved cooling
SANGAM, KEDARNATH, LERNER, ALEXANDER, SORABJI, KHURSHED, RANISH, JOSEPH M
Year of Publication 21.11.2014
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Year of Publication 21.11.2014
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HIGH THROUGHPUT MULTI-WAFER EPITAXIAL REACTOR
TRUONG QUOC VINH, KASZUBA ANDRZEJ, SANGAM KEDARNATH, RAVI TIRUNELVELI S, SIVARAMAKRISHNAN VISWESWAREN
Year of Publication 21.10.2010
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Year of Publication 21.10.2010
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Slit valve having increased flow uniformity
WU, ELIZABETH, SANGAM, KEDARNATH, BALASUBRAMANYAM, CHANDRASEKHAR, LEE, HELDER, SCHWARTZ, MIRIAM
Year of Publication 11.11.2016
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Year of Publication 11.11.2016
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HIGH THROUGHPUT MULTI-WAFER EPITAXIAL REACTOR
KASZUBA, ANDRZEJ, SIVARAMAKRISHNAN, VISWESWAREN, SANGAM, KEDARNATH, TRUONG, QUOC, VINH, RAVI, TIRUNELVELI, S
Year of Publication 02.09.2010
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Year of Publication 02.09.2010
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High Throughput Multi-Wafer Epitaxial Reactor
TRUONG QUOC VINH, KASZUBA ANDRZEJ, SANGAM KEDARNATH, RAVI TIRUNELVELI S, SIVARAMAKRISHNAN VISWESWAREN
Year of Publication 26.08.2010
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Year of Publication 26.08.2010
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SLIT VALVE HAVING INCREASED FLOW UNIFORMITY
WU, ELIZABETH, SANGAM, KEDARNATH, BALASUBRAMANYAM, CHANDRASEKHAR, LEE, HELDER, SCHWARTZ, MIRIAM
Year of Publication 18.02.2010
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Year of Publication 18.02.2010
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SLIT VALVE HAVING INCREASED FLOW UNIFORMITY
WU, ELIZABETH, SANGAM, KEDARNATH, BALASUBRAMANYAM, CHANDRASEKHAR, LEE, HELDER, SCHWARTZ, MIRIAM
Year of Publication 12.11.2009
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Year of Publication 12.11.2009
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SLIT VALVE HAVING INCREASED FLOW UNIFORMITY
SCHWARTZ MIRIAM, SANGAM KEDARNATH, WU ELIZABETH, LEE HELDER, BALASUBRAMANYAM CHANDRASEKHAR
Year of Publication 05.11.2009
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Year of Publication 05.11.2009
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