Experimental investigation of the impact of LWR on sub-100-nm device performance
Hyun-Woo Kim, Ji-Young Lee, Shin, J., Sang-Gyun Woo, Han-Ku Cho, Joo-Tae Moon
Published in IEEE transactions on electron devices (01.12.2004)
Published in IEEE transactions on electron devices (01.12.2004)
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Journal Article
A New Platform for ArF Lithography
Kim, Hyun-Woo, Choi, Sang-Jun, Woo, Sang-Gyun, Moon, Joo-Tae
Published in Journal of Photopolymer Science and Technology (2000)
Published in Journal of Photopolymer Science and Technology (2000)
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Journal Article
ArF Bi-layer Resist for sub-90nm L/S Fabrication
Kim, Hyun-Woo, Hong, J., Jung, Myung-Ho, Woo, Sang-Gyun, Cho, Han-Ku, Han, Woo-Sung
Published in Journal of photopolymer science and technology (2003)
Published in Journal of photopolymer science and technology (2003)
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Journal Article
Etching Characteristics of Fine Ta Patterns with Electron Cyclotron Resonance Chlorine Plasma
Woo, Sang-Gyun, Kim, Sang Hoon, Ju, Sup-Youl, Son, Joo-Hiuk, Ahn, Jinho
Published in Japanese Journal of Applied Physics (01.12.2000)
Published in Japanese Journal of Applied Physics (01.12.2000)
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Journal Article
Application of VEMA type ArF Resist to Sub-100nm Lithography
Kim, Hyun-Woo, Lee, Sook, Choi, Sang-Jun, Woo, Sang-Gyun, Chae, Yun-Sook, Kim, Jisoo, Moon, Joo-Tae, Kavanagh, Robert, Barclay, George
Published in Journal of Photopolymer Science and Technology (01.01.2002)
Published in Journal of Photopolymer Science and Technology (01.01.2002)
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Journal Article
Effects of gas ring position and mesh introduction on film quality and thickness uniformity
Hong, Seungbum, Kim, Eunah, Jiang, Zhong-Tao, Bae, Byeong-Soo, No, Kwangsoo, Lim, Sung-Chul, Woo, Sang-Gyun, Koh, Young-Bum
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.03.1997)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.03.1997)
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Journal Article
Measurement of the strength of adhesion of resist patterns using an atomic force microscope
Kim, Sung-Kyoung, Jung, Myoung-Ho, Kim, Hyun-Woo, Woo, Sang-Gyun, Lee, Haiwon
Published in Nanotechnology (01.10.2005)
Published in Nanotechnology (01.10.2005)
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Journal Article
Single-layer halftone phase-shifting masks for DUV microlithography: optical property simulation and chromium compound film preparation
Jiang, Zhong-Tao, Hong, Seungbum, Kim, Eunah, Bae, Byeong-Soo, Lim, Sungchul, Woo, Sang-Gyun, Koh, Young-Bum, No, Kwangsoo
Published in Applied surface science (01.04.1997)
Published in Applied surface science (01.04.1997)
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Journal Article
Photobleaching Photoacid Generator
Kim, Jin-Baek, Jang, Ji-Hyun, Kim, Hyun-Woo, Woo, Sang-Gyun
Published in Journal of Photopolymer Science and Technology (2001)
Published in Journal of Photopolymer Science and Technology (2001)
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Journal Article
A New 193 nm Single Layer Resist Based on Cycloolefin Maleic Anhydride Polymers
Lee, Si-Hyeung, Kwon, Ki-Young, Jung, Dong-Won, Lee, Sook, Yoon, Kwang-Sub, Kim, Hyun-Woo, Choi, Sang-Jun, Woo, Sang-Gyun, Moon, Joo-Tae
Published in Journal of photopolymer science and technology (2000)
Published in Journal of photopolymer science and technology (2000)
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Journal Article
Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography
Jiang, Zhong-Tao, Hong, Seungbum, Kim, Eunah, Bae, Byeong-Soo, No, Kwangsoo, Hwangbo, Chang Kwon, Lim, Sung-Chul, Woo, Sang-Gyun, Koh, Young-Bum
Published in Semiconductor science and technology (01.10.1996)
Published in Semiconductor science and technology (01.10.1996)
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Journal Article
Analsysis of Process Parameters to Improve In-Chip Linewidth Variation
Yun-Kyeong Jang, Doo-Youl Lee, Sung-Woo Lee, Eun-Mi Lee, Soo-Han Choi, Yool Kang, Gi-Sung Yeo, Sang-Gyun Woo, Han-Ku Cho, Jong-Rak Park
Published in Journal of semiconductor technology and science (2004)
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Published in Journal of semiconductor technology and science (2004)
Journal Article
Which Mask is Preferred for Sub-60 nm Node Imaging?
Kim, Sung-Hyuck, Kim, Soon-Ho, Kim, Yong-Hoon, Lee, Jeung-Woo, Woo, Sang-Gyun, Cho, Han-Ku, Oh, Hye-Keun
Published in Japanese Journal of Applied Physics (01.09.2007)
Published in Japanese Journal of Applied Physics (01.09.2007)
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Journal Article
간농양을 동반한 원발성 간암에서 간동맥 화학색전술 후 발생한 간흉강루 1 예
우상균, Sang Gyun Woo, 정시욱, Si Wook Jung, 김연재, Yeon Jae Kim, 이병기, Byung Ki Lee, 김현수, Hyun Su Kim, 김원호, Won Ho Kim, 김희진, Hee Jin Kim, 김병석, Byung Suck Kim
Published in The Korean journal of medicine (01.03.2002)
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Published in The Korean journal of medicine (01.03.2002)
Journal Article
말초혈관질환이 있는 인슐린비의존형 당뇨병 환자에 있어서 혈액 내 Plasminogen Activator Inhibitor - 1 ( PAI - 1 ) 및 lipoprotein ( a ) 농도
남성진, Sung Jin Nam, 조성래, Sung Rae Cho, 김추성, Choo Sung Kim, 우상균, Sang Gyun Woo, 최희진, Hee Jin Choi, 김상기, Sang Ki Kim, 박재홍, Jae Hong Park, 이인규, In Kyu Lee, 한승범, Seong Bum Han, 한승엽, Seung Yup Han, 김정철, Chung Chul Kim
Published in Diabetes & metabolism journal (28.02.1999)
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Published in Diabetes & metabolism journal (28.02.1999)
Journal Article