Atomic Layer Deposition of Cobalt Silicide Thin Films Studied by in Situ Infrared Spectroscopy
Bernal-Ramos, Karla, Saly, Mark J, Kanjolia, Ravindra K, Chabal, Yves J
Published in Chemistry of materials (28.07.2015)
Published in Chemistry of materials (28.07.2015)
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Journal Article
Thermal atomic layer deposition of rhenium nitride and rhenium metal thin films using methyltrioxorhenium
Cwik, Stefan, Woods, Keenan N, Perera, S. Sameera, Saly, Mark J, Knisley, Thomas J, Winter, Charles H
Published in Dalton transactions : an international journal of inorganic chemistry (14.12.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (14.12.2021)
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Journal Article
Volatility and High Thermal Stability in Mid- to Late-First-Row Transition-Metal Diazadienyl Complexes
Knisley, Thomas J, Saly, Mark J, Heeg, Mary Jane, Roberts, John L, Winter, Charles H
Published in Organometallics (26.09.2011)
Published in Organometallics (26.09.2011)
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Journal Article
Volatility and High Thermal Stability in Mid-to-Late First-Row Transition-Metal Complexes Containing 1,2,5-Triazapentadienyl Ligands
Kalutarage, Lakmal C, Heeg, Mary Jane, Martin, Philip D, Saly, Mark J, Kuiper, David S, Winter, Charles H
Published in Inorganic chemistry (04.02.2013)
Published in Inorganic chemistry (04.02.2013)
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Journal Article
금속 도핑된 탄소 하드마스크들
SALY MARK J, VENKATASUBRAMANIAN ESWARANAND, MALLICK ABHIJIT BASU, BHUYAN BHASKAR JYOTI
Year of Publication 26.01.2024
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Year of Publication 26.01.2024
Patent
이중 기공 디바이스들을 제조하기 위한 방법들
SALY MARK J, DURAND WILLIAM J, WOODS KEENAN NAVARRE, QUON ROGER, SREENIVASAN RAGHAV, JOHNSON JOSEPH R, CHUDZIK MICHAEL, BHUYAN BHASKAR JYOTI
Year of Publication 06.09.2022
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Year of Publication 06.09.2022
Patent
PRECURSORS FOR PLASMA ACTIVATED CONFORMAL FILM DEPOSITION
SALY MARK J, ODEDRA RAJESH, KANJOLIA RAVI, MOSER DANIEL, LAVOIE ADRIEN
Year of Publication 11.11.2019
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Year of Publication 11.11.2019
Patent
Precursor design and reaction mechanisms for the atomic layer deposition of metal films
Bernal Ramos, Karla, Saly, Mark J., Chabal, Yves J.
Published in Coordination chemistry reviews (01.12.2013)
Published in Coordination chemistry reviews (01.12.2013)
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Journal Article
PRECURSORS FOR PLASMA ACTIVATED CONFORMAL FILM DEPOSITION
SALY MARK J, ODEDRA RAJESH, KANJOLIA RAVI, MOSER DANIEL, LAVOIE ADRIEN
Year of Publication 22.08.2013
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Year of Publication 22.08.2013
Patent