Temperature-Insensitive Composite Micromechanical Resonators
Melamud, R., Chandorkar, S.A., Bongsang Kim, Hyung Kyu Lee, Salvia, J.C., Bahl, G., Hopcroft, M.A., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.12.2009)
Published in Journal of microelectromechanical systems (01.12.2009)
Get full text
Journal Article
Thermal Isolation of Encapsulated MEMS Resonators
Jha, C.M., Hopcroft, M.A., Chandorkar, S.A., Salvia, J.C., Agarwal, M., Candler, R.N., Melamud, R., Bongsang Kim, Kenny, T.W.
Published in Journal of microelectromechanical systems (01.02.2008)
Published in Journal of microelectromechanical systems (01.02.2008)
Get full text
Journal Article
Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators
Bahl, G., Melamud, R., Kim, B., Chandorkar, S.A., Salvia, J.C., Hopcroft, M.A., Elata, D., Hennessy, R.G., Candler, R.N., Howe, R.T., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.02.2010)
Published in Journal of microelectromechanical systems (01.02.2010)
Get full text
Journal Article