X-ray microlithography with a transition radiation source
Goedtkindt, P., Salomé, J.-M., Artru, X., Dhez, P., Maene, N., Poortmans, F., Wartski, L.
Published in Microelectronic engineering (01.01.1991)
Published in Microelectronic engineering (01.01.1991)
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