Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufacturing thereby
MOORS, JOHANNES HUBERTUS, SALASHCHENKO, NIKOLAY NIKOLAEVITCH, SJMAENOK, LEONID AIZIKOVITCH, BANINE, VADIM YEVGENYEVICH
Year of Publication 21.07.2010
Get full text
Year of Publication 21.07.2010
Patent
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
Banine, Vadim Yevgenyevich, Moors, Johannes Hubertus Josephina, Shmaenok, Leonid, Salashchenko, Nikolay Nikolaevitch
Year of Publication 29.12.2009
Get full text
Year of Publication 29.12.2009
Patent
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
BANINE VADIM YEVGENYEVICH, SALASHCHENKO NIKOLAY NIKOLAEVITCH, SHMAENOK LEONID, MOORS JOHANNES HUBERTUS JOSEPHINA
Year of Publication 29.12.2009
Get full text
Year of Publication 29.12.2009
Patent
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufacturing thereby
MOORS, JOHANNES HUBERTUS, SALASHCHENKO, NIKOLAY NIKOLAEVITCH, SJMAENOK, LEONID AIZIKOVITCH, BANINE, VADIM YEVGENYEVICH
Year of Publication 29.04.2009
Get full text
Year of Publication 29.04.2009
Patent
MULTI-LAYER SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL PURITY FILTER, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
SALASHCHENKO, NIKOLAY, NIKOLAEVITCH, BANINE, VADIM YEVGENYEVICH, SJMAENOK, LEONID, AIZIKOVITCH, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 28.11.2008
Get full text
Year of Publication 28.11.2008
Patent
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
BANINE VADIM YEVGENYEVICH, SALASHCHENKO NIKOLAY NIKOLAEVITCH, SHMAENOK LEONID, MOORS JOHANNES HUBERTUS JOSEPHINA
Year of Publication 26.06.2008
Get full text
Year of Publication 26.06.2008
Patent
Multi-layer spectral purity filter lithographic apparatus including such a spectral purity filter and device manufacturing method, and device manufactured thereby
SALASHCHENKO, NIKOLAY NIKOLAEVITCH, SJMAENOK, LEONID AIZIKOVITCH, BANINE, VADIM YEVGENYEVICH, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 06.06.2007
Get full text
Year of Publication 06.06.2007
Patent
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
BANINE VADIM YEVGENYEVICH, SALASHCHENKO NIKOLAY NIKOLAEVITCH, MOORS JOHANNES HUBERTUS JOSEPHINA, SJMAENOK LEONID AIZIKOVITCH
Year of Publication 30.10.2006
Get full text
Year of Publication 30.10.2006
Patent
MULTI-LAYER SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL PURITY FILTER, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
BANINE VADIM YEVGENYEVICH, SALASHCHENKO NIKOLAY NIKOLAEVITCH, MOORS JOHANNES HUBERTUS JOSEPHINA, SJMAENOK LEONID AIZIKOVITCH
Year of Publication 11.10.2006
Get full text
Year of Publication 11.10.2006
Patent
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter and device manufacturing method, and device manufactured thereby
SALASHCHENKO, NIKOLAY NIKOLAEVITCH, SJMAENOK, LEONID AIZIKOVITCH, BANINE, VADIM YEVGENYEVICH, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 04.10.2006
Get full text
Year of Publication 04.10.2006
Patent
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
SALASHCHENKO, NIKOLAY NIKOLAEVITCH, SJMAENOK, LEONID AIZIKOVITCH, BANINE, VADIM YEVGENYEVICH, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 01.12.2008
Get full text
Year of Publication 01.12.2008
Patent