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"Sakata, Katsunori"
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포드 오프너
by
SAKATA KATSUNORI
Year of Publication
27.05.2020
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박판형상 기판 유지 핑거 및 이 핑거를 구비하는 반송 로봇
by
SAKATA KATSUNORI
Year of Publication
17.01.2020
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POD OPENER
by
SAKATA
,
Katsunori
Year of Publication
18.04.2019
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CONTAINER STORAGE DEVICE
by
SAKATA KATSUNORI
Year of Publication
10.01.2019
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THIN-PLATE SUBSTRATE HOLDING FINGER AND TRANSFER ROBOT PROVIDED WITH SAID FINGER
by
SAKATA Katsunori
Year of Publication
15.11.2018
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박판 형상 기판 유지 장치 및 유지 장치를 구비하는 반송 로봇
by
SAKATA KATSUNORI
,
SATO YASUHISA
Year of Publication
13.10.2020
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THIN PLATE-LIKE SUBSTRATE HOLDING DEVICE AND TRANSFER ROBOT PROVIDED WITH HOLDING DEVICE
by
SATO YUKIHISA
,
SAKATA KATSUNORI
Year of Publication
22.08.2019
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THIN PLATE-SHAPED SUBSTRATE HOLDING DEVICE, AND HOLDING DEVICE EQUIPPED TRANSPORT ROBOT
by
SATO Yasuhisa
,
SAKATA Katsunori
Year of Publication
15.08.2019
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LOADING PORT AND LOADING PORT ATMOSHPERE SUBSTITUTION METHOD
by
SAKATA KATSUNORI
,
OKUTSU HIDEKAZU
Year of Publication
17.05.2017
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LOADING PORT AND LOADING PORT ATMOSHPERE SUBSTITUTION METHOD
by
OKUTSU, HIDEKAZU
,
SAKATA
,
KATSUNORI
Year of Publication
10.03.2016
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국소 퍼지 기능을 갖는 반송 장치
by
SAKATA KATSUNORI
,
OKUTSU HIDEKAZU
,
SATO YASUHISA
,
HIROTA KENJI
Year of Publication
17.03.2021
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ACCOMMODATING CONTAINER, SHUTTER OPENING AND CLOSING UNIT FOR ACCOMMODATING CONTAINER, AND WAFER STOCKER USING SAME
by
SAKIYA FUMIO
,
SAKATA KATSUNORI
Year of Publication
07.01.2015
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TRANSPORT DEVICE WITH LOCAL PURGE FUNCTION
by
SATO YUKIHISA
,
SAKATA KATSUNORI
,
OKUTSU HIDEKAZU
,
HIROTA KENJI
Year of Publication
23.01.2020
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TRANSPORT DEVICE HAVING LOCAL PURGE FUNCTION
by
HIROTA Kenji
,
SATO Yasuhisa
,
OKUTSU Hidekazu
,
SAKATA Katsunori
Year of Publication
16.01.2020
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THIN-PLATE SUBSTRATE HOLDING FINGER AND TRANSFER ROBOT PROVIDED WITH SAID FINGER
by
SAKATA Katsunori
Year of Publication
01.05.2024
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THIN-PLATE SUBSTRATE HOLDING FINGER AND TRANSFER ROBOT PROVIDED WITH SAID FINGER
by
SAKATA Katsunori
Year of Publication
01.05.2024
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ACCOMMODATING CONTAINER, SHUTTER OPENING AND CLOSING UNIT FOR ACCOMMODATING CONTAINER, AND WAFER STOCKER USING SAME
by
SAKIYA, FUMIO
,
SAKATA
,
KATSUNORI
Year of Publication
24.10.2013
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POD OPENER
by
SAKATA
,
Katsunori
Year of Publication
07.06.2023
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POD OPENER
by
SAKATA
,
Katsunori
Year of Publication
07.06.2023
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ATMOSPHERE REPLACEMENT DEVICE
by
SAKATA KATSUNORI
,
OKUTSU HIDEKAZU
Year of Publication
20.03.2012
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