수평 버핑 모듈
GOLUBOVSKY EDWARD, SAKATA CLINTON, MIKHAYLICHENKO EKATERINA, ZUNIGA STEVEN M, RANGARAJAN JAGAN
Year of Publication 22.08.2022
Get full text
Year of Publication 22.08.2022
Patent
SYSTEMS, METHODS AND APPARATUS FOR POST-CHEMICAL MECHANICAL PLANARIZATION SUBSTRATE BUFF PRE-CLEANING
CHEN YUFEI, ATKINSON JIM K, SAKATA CLINTON P, DING YUNSHUANG, BROWN BRIAN J, CHEN HUI, TANG JIANSHE
Year of Publication 04.07.2016
Get full text
Year of Publication 04.07.2016
Patent
PAD CARRIER ASSEMBLY FOR HORIZONTAL PRE-CLEAN MODULE
SAKATA, Clinton, GOLUBOVSKY, Edward, MIKHAYLICHENKO, Ekaterina, RANGARAJAN, Jagan
Year of Publication 24.08.2023
Get full text
Year of Publication 24.08.2023
Patent
PAD CARRIER ASSEMBLY FOR HORIZONTAL PRE-CLEAN MODULE
SAKATA, Clinton, GOLUBOVSKY, Edward, MIKHAYLICHENKO, Ekaterina A, RANGARAJAN, Jagan
Year of Publication 24.08.2023
Get full text
Year of Publication 24.08.2023
Patent
HORIZONTAL BUFFING MODULE
SAKATA, Clinton, GOLUBOVSKY, Edward, MIKHAYLICHENKO, Ekaterina, RANGARAJAN, Jagan, ZUNIGA, Steven M
Year of Publication 12.05.2022
Get full text
Year of Publication 12.05.2022
Patent
HORIZONTAL BUFFING MODULE
SAKATA, Clinton, GOLUBOVSKY, Edward, MIKHAYLICHENKO, Ekaterina A, RANGARAJAN, Jagan, ZUNIGA, Steven M
Year of Publication 05.05.2022
Get full text
Year of Publication 05.05.2022
Patent
Pad carrier assembly for horizontal pre-clean module
MIKHAYLICHENKO, EKATERINA, SAKATA, CLINTON, GOLUBOVSKY, EDWARD, RANGARAJAN, JAGAN
Year of Publication 01.09.2023
Get full text
Year of Publication 01.09.2023
Patent
Module, method, and system for processing a substrate
ZUNIGA, STEVEN M, MIKHAYLICHENKO, EKATERINA, SAKATA, CLINTON, GOLUBOVSKY, EDWARD, RANGARAJAN, JAGAN
Year of Publication 16.04.2024
Get full text
Year of Publication 16.04.2024
Patent
Module, method, and system for processing a substrate
ZUNIGA, STEVEN M, MIKHAYLICHENKO, EKATERINA, SAKATA, CLINTON, GOLUBOVSKY, EDWARD, RANGARAJAN, JAGAN
Year of Publication 21.01.2024
Get full text
Year of Publication 21.01.2024
Patent
Horizontal buffing module
ZUNIGA, STEVEN M, MIKHAYLICHENKO, EKATERINA, SAKATA, CLINTON, GOLUBOVSKY, EDWARD, RANGARAJAN, JAGAN
Year of Publication 16.09.2022
Get full text
Year of Publication 16.09.2022
Patent
Substrate processing module and modular substrate processing system
MIKHAYLICHENKO EKATERINA, ZUNIGA STEVEN M, CLINTON, SAKATA, GOLUBOWSKI EDWARD, RANGARAJAN JAGAN
Year of Publication 28.06.2022
Get full text
Year of Publication 28.06.2022
Patent