A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits
Saint-Etienne, E., Pons, P., Blasquez, G., Temple, P., Conedera, V., Dilhan, M., Chauffleur, X., Menini, Ph, Plana, R., Parra, T., Guillon, B., Lalaurie, J.C.
Published in Sensors and actuators. A, Physical (15.06.1998)
Published in Sensors and actuators. A, Physical (15.06.1998)
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Journal Article
Conference Proceeding
Micromachined millimeter-wave technology
Saint-Etienne, E., Guillon, B., Pons, P., Blasquez, G., Parra, T., Blondy, P., Lalaurie, J.C., Plana, R., Graffeuil, J.
Published in 1997 21st International Conference on Microelectronics. Proceedings (1997)
Published in 1997 21st International Conference on Microelectronics. Proceedings (1997)
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Conference Proceeding
PROCESS AND DEVICE FOR TREATING PERFLORINAED GAS AND HYDROFLUOROCARBON
ROSTAING JEAN CLAUDE, MICHEL MOISAN, CLAUDE DE SAINT ETIENNE, FRANCOIS COEURET
Year of Publication 23.06.1998
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Year of Publication 23.06.1998
Patent
High Performances Micro-Machined Millimeter-Wave Structures
Guillon, B., Saint-Etienne, E., Pons, P., Blasquez, G., Parra, T., Lalaurie, J.C., Cros, D., Graffeuil, J., Plana, R.
Published in 1998 28th European Microwave Conference (01.10.1998)
Published in 1998 28th European Microwave Conference (01.10.1998)
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Conference Proceeding