A comparative study of the bonding energy in adhesive wafer bonding
Forsberg, F, Saharil, F, Haraldsson, T, Roxhed, N, Stemme, G, van der Wijngaart, W, Niklaus, F
Published in Journal of micromechanics and microengineering (01.08.2013)
Published in Journal of micromechanics and microengineering (01.08.2013)
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Journal Article
Low temperature adhesive wafer bonding using OSTE(+) for heterogeneous 3D MEMS integration
Forsberg, F., Saharil, F., Stemme, G., Roxhed, N., van der Wijngaart, W., Haraldsson, T., Niklaus, F.
Published in 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2013)
Published in 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2013)
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Conference Proceeding
Journal Article
Educational Java applets for MOS capacitor
Saharil, F., Hasbi, A.M., Hussin, H.
Published in 2004 IEEE International Conference on Semiconductor Electronics (2004)
Published in 2004 IEEE International Conference on Semiconductor Electronics (2004)
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Conference Proceeding
Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS)
Saharil, F., Tamsir, A.S., Majlis, B.Y.
Published in ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575) (2002)
Published in ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575) (2002)
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Conference Proceeding
Robust microdevice manufacturing by direct lithography and adhesive-free bonding of off-stoichiometry thiol-ene-epoxy (OSTE+) polymer
Vastesson, A., Zhou, X., Sandstrom, N., Saharil, F., Supekar, O., Stemme, G., van der Wijngaart, W., Haraldsson, T.
Published in 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (01.06.2013)
Published in 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (01.06.2013)
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Conference Proceeding
Dry transfer bonding of porous silicon membranes to OSTE(+) polymer microfluidic devices
Saharil, F., Gylfason, K. B., Liu, Y., Haraldsson, T., Bettotti, P., Kumar, N., van der Wijngaart, W.
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2012)
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2012)
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Conference Proceeding
The optimization of mechanical harmonic modes of the 75 g balanced weight distribution capacitive accelerometer
Tamsir, A.S., Saharil, F., Majlis, B.Y.
Published in ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575) (2002)
Published in ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575) (2002)
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Conference Proceeding
On the use of MEMs accelerometer to detect fatigue department
Hussain, A., Saharil, F., Mokri, R.H., Majlis, B.Y.
Published in 2004 IEEE International Conference on Semiconductor Electronics (2004)
Published in 2004 IEEE International Conference on Semiconductor Electronics (2004)
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Conference Proceeding