A MEMS Accelerometer for Sub-mG Sensing
Yamane, Daisuke, Konishi, Toshifumi, Safu, Teruaki, Toshiyoshi, Hiroshi, Sone, Masato, Machida, Katsuyuki, Ito, Hiroyuki, Masu, Kazuya
Published in Sensors and materials (01.01.2019)
Published in Sensors and materials (01.01.2019)
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Journal Article
Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer
Yamane, Daisuke, Konishi, Toshifumi, Safu, Teruaki, Toshiyoshi, Hiroshi, Sone, Masato, Masu, Kazuya, Machida, Katsuyuki
Published in Microelectronics and reliability (01.11.2016)
Published in Microelectronics and reliability (01.11.2016)
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Journal Article
A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology
Konishi, Toshifumi, Safu, Teruaki, Machida, Katsuyuki, Yamane, Daisuke, Sone, Masato, Masu, Kazuya, Toshiyoshi, Hiroshi
Published in 2016 IEEE SENSORS (01.10.2016)
Published in 2016 IEEE SENSORS (01.10.2016)
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Conference Proceeding
Long-term vibration characteristics of MEMS inertial sensors by multi-layer metal technology
Yamane, Daisuke, Konishi, Toshifumi, Safu, Teruaki, Tachibana, Koichiro, Teranishi, Minami, Chun-Vi Chen, Chang, Tso-Fu Mark, Sone, Masato, Machida, Katsuyuki, Masu, Kazuya
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.08.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.08.2017)
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Conference Proceeding
MICROELEMENT MANUFACTURING METHOD
YAMANE DAISUKE, KONISHI TOSHIFUMI, SAFU TERUAKI, EKI KAZUYA, MACHIDA KATSUYUKI
Year of Publication 11.10.2018
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Year of Publication 11.10.2018
Patent
FINE ELEMENT
ITO HIROYUKI, YAMANE DAISUKE, KONISHI TOSHIFUMI, SAFU TERUAKI, EKI KAZUYA, IIDA SHINICHI, MACHIDA KATSUYUKI
Year of Publication 05.12.2019
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Year of Publication 05.12.2019
Patent
ANALYZER
YAMANE DAISUKE, KONISHI TOSHIFUMI, SAFU TERUAKI, EKI KAZUYA, MACHIDA KATSUYUKI
Year of Publication 30.03.2017
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Year of Publication 30.03.2017
Patent
FINE ELEMENT AND MANUFACTURING METHOD THEREOF
ITO HIROYUKI, YAMANE DAISUKE, KONISHI TOSHIFUMI, SAFU TERUAKI, EKI KAZUYA, MACHIDA KATSUYUKI
Year of Publication 06.07.2017
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Year of Publication 06.07.2017
Patent
FINE ELEMENT AND MANUFACTURING METHOD OF THE SAME
CHEN CHUN-YI, TSO-FU MARK CHANG, YAMANE DAISUKE, KONISHI TOSHIFUMI, SAFU TERUAKI, EKI KAZUYA, SONE MASATO, MACHIDA KATSUYUKI
Year of Publication 11.10.2018
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Year of Publication 11.10.2018
Patent
BLANKING APERTURE ARRAY DEVICE OF MULTIBEAM, AND METHOD OF MANUFACTURING BLANKING APERTURE ARRAY DEVICE OF MULTIBEAM
CHIBA KAZUHIRO, MATSUMOTO YASUSHI, YOSHIKAWA RYOICHI, KUDO KAZUHISA, MORITA HIROBUMI, YAMADA HIROKAZU, KONISHI TOSHIFUMI, SAFU TERUAKI, MATSUSHIMA TAKAAKI, YANO MASAKI, OGASAWARA MUNEHIRO, MACHIDA KATSUYUKI
Year of Publication 20.06.2016
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Year of Publication 20.06.2016
Patent
BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION METHOD OF BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS
CHIBA KAZUHIRO, YOSHIKAWA RYOICHI, KUDO KAZUHISA, YAMADA HIROKAZU, KONISHI TOSHIFUMI, MORITA HIROFUMI, MATSUMOTO HIROSHI, SAFU TERUAKI, MATSUSHIMA TAKAAKI, YANO MASAKI, OGASAWARA MUNEHIRO, MACHIDA KATSUYUKI
Year of Publication 10.06.2016
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Year of Publication 10.06.2016
Patent
A 3-D Parallel-Plate MEMS Accelerometer with a Gold Proof Mass
Yamane, Daisuke, Machida, Katsuyuki, Masu, Kazuya, Otobe, Shota, Atsumi, Ken, Koga, Tatsuya, Konishi, Toshifumi, Safu, Teruaki, Iida, Shinichi, Ito, Hiroyuki, Ishihara, Noboru
Published in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2019)
Published in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2019)
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Conference Proceeding
A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology
Yamane, Daisuke, Konishi, Toshifumi, Safu, Teruaki, Toshiyoshi, Hiroshi, Sone, Masato, Masu, Kazuya, Machida, Katsuyuki
Published in 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (01.04.2016)
Published in 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (01.04.2016)
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Conference Proceeding
Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams
Morita Hirofumi, Matsumoto Hiroshi, Yoshikawa Ryoichi, Kudo Kazuhisa, Ogasawara Munehiro, Chiba Kazuhiro, Konishi Toshifumi, Yamada Hirokazu, Matsushima Takaaki, Machida Katsuyuki, Safu Teruaki, Yano Masaki
Year of Publication 27.12.2016
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Year of Publication 27.12.2016
Patent
BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION METHOD OF BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS
CHIBA KAZUHIRO, YOSHIKAWA RYOICHI, KUDO KAZUHISA, YAMADA HIROKAZU, KONISHI TOSHIFUMI, MORITA HIROFUMI, MATSUMOTO HIROSHI, SAFU TERUAKI, MATSUSHIMA TAKAAKI, YANO MASAKI, OGASAWARA MUNEHIRO, MACHIDA KATSUYUKI
Year of Publication 02.06.2016
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Year of Publication 02.06.2016
Patent