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Year of Publication 04.04.2023
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Year of Publication 04.04.2023
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E-beam apparatus
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Year of Publication 26.04.2022
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Year of Publication 26.04.2022
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E-beam apparatus
Baggen, Marcel Koenraad Marie, Kremers, Maarten Frans Janus, Hol, Sven Antoin Johan, Van De Groes, Henricus Martinus Johannes, Hempenius, Peter Paul, Bosch, Niels Johannes Maria
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Year of Publication 15.12.2020
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Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator
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Year of Publication 06.08.2019
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Support for a movable element and lithography apparatus
Fischer Olof Martinus Josephus, Boon Fidelus Adrianus, Hol Sven Antoin Johan
Year of Publication 03.01.2017
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Year of Publication 03.01.2017
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SUBSTRATE POSITIONING DEVICE AND ELECTRON BEAM INSPECTION TOOL
BAGGEN, Marcel Koenraad Marie, BOSCH, Niels Johannes Maria, VAN DE RIJDT, Johannes Hubertus Antonius, KIMMAN, Maarten Hartger, HEMPENIUS, Peter Paul, VAN KEMPEN, Robertus Jacobus Theodorus, VAN DE GROES, Henricus Martinus Johannes, KREMERS, Maarten Frans Janus, HOL, Sven Antoin Johan
Year of Publication 26.11.2020
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Year of Publication 26.11.2020
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Bobbin for cooling objective lens of a charged-particle beam system and related computer readable storage medium
VAN HEUMEN, MARTIJN PETRUS CHRISTIANUS, HOL, SVEN ANTOIN JOHAN, GOSEN, JEROEN GERARD, HOSSEINI, NASEH, VAN BANNING, DENNIS HERMAN CASPAR
Year of Publication 21.07.2022
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Year of Publication 21.07.2022
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Lithographic apparatus comprising an actuator, and method for protecting such actuator
Huang Yang-Shan, Broers Sander Christiaan, Cadee Theodorus Petrus Maria, De Groot Antonius Franciscus Johannes, Hol Sven Antoin Johan, Van De Ven Bastiaan Lambertus Wilhelmus Marinus
Year of Publication 20.03.2018
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Year of Publication 20.03.2018
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Particle beam apparatus, method for positioning an object table of an particle beam apparatus, and non-transitory computer readable storage medium
BAGGEN, MARCEL KOENRAAD MARIE, HEMPENIUS, PETER PAUL, BOSCH, NIELS JOHANNES MARIA, HOL, SVEN ANTOIN JOHAN
Year of Publication 01.01.2021
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Year of Publication 01.01.2021
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